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首页> 外文期刊>Circuits, Devices & Systems, IET >Bandwidth controlled weakly connected MEMS resonators based narrowband filter
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Bandwidth controlled weakly connected MEMS resonators based narrowband filter

机译：基于窄带滤波器的带宽控制弱连接的MEMS谐振器

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摘要

Electrical tuning of bandwidth is critical for microelectromechanical system (MEMS) resonator-based narrowband filters especially at ultra-high frequency ranges and beyond. The resonance frequency of MEMS resonators is highly susceptible to fabrication process uncertainties and very small fabrication variations could result in significant shift in their resonance frequency. Although, disk resonators are the most acceptable candidates for implementing of resonators at GHz frequencies, according to their high stiffness, electrical tuning of these resonators and consequently the resulting filters is almost impossible. This study presents a novel tuning method for low velocity through anchor coupled MEMS radial contour mode disk resonators based on the coupling beam's stiffness tuning using the piezoelectric effect. As the results of this method, high bandwidth tuning ratio as 1:1.25 is achieved due to changing the tuning DC voltage from 0 to 20 V. This impressive result for a narrowband filter with 450 kHz of bandwidth is achieved due to changing the stiffness of low stiff coupling beam which is much easier to control in comparison with extremely high stiffness disk resonators. Various simulation results, as well as analytical works, verify the proposed approach.
机译：带宽的电子调谐对于微机电系统（MEMS）谐振器的窄带滤光片尤其是超高频范围及更远的微电子窄带滤光片。 MEMS谐振器的共振频率高易受制造工艺的不确定性，并且非常小的制造变化可能导致其共振频率的显着变化。虽然，磁盘谐振器是用于在GHz频率下实现谐振器的最可接受的候选者，但根据它们的高刚度，这些谐振器的电动调谐，因此所得到的过滤器几乎不可能。本研究提出了一种新颖的通过锚耦合MEMS径向轮廓模式盘谐振器基于使用压电效应的耦合光束调谐的小型调谐方法。随着该方法的结果，由于改变0到20 V的调谐直流电压，实现高带宽调谐比为1：1.25。由于改变刚度，因此实现了具有450 kHz带宽的窄带滤波器的令人印象深刻的结果与极高的刚度磁盘谐振器相比，低凸轴耦合光束更容易控制。各种仿真结果，以及分析作品，验证了所提出的方法。

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