...
首页> 外文期刊>CleanRooms >There's more than meets the eye in sonic-based surface preparation Stay on top of process variables and the evolving understanding of sonics when setting up and maintaining ultrasonic and megasonic cleaning systems
【24h】

There's more than meets the eye in sonic-based surface preparation Stay on top of process variables and the evolving understanding of sonics when setting up and maintaining ultrasonic and megasonic cleaning systems

机译:在基于声波的表面处理中,不仅仅可以看到眼球,还可以在设置和维护超声和大声波清洗系统时,始终掌握工艺变量和对超声波的不断了解。

获取原文
获取原文并翻译 | 示例
           

摘要

Cleaning by the interaction of sound with liquid―ultrasonics and megasonics―is an ongoing source of inspiration and controversy. Ultrasonics and megasonics are not distinct or competing techniques but are actually a continuum. Both are based on sound waves traveling through liquid, producing cycles of compression and rarefaction. Vapor-filled bubbles result from tears in the liquid. The differences between ultrasonics and megasonics are in the frequencies of these sound waves. At lower ultrasonic frequencies, cavitation bubbles (actually vacuum voids) are relatively transient, growing then imploding with tremendous localized force and heat. At the higher frequencies associated with megasonic cleaning, bubbles are smaller and more stable. In megasonic cleaning, other forces such as acoustic streaming are more important; its action is directional―line-of-sight―and more suited to wafer fabrication. Ultrasonic cleaning produces a multi-directional "surround-sound," allowing cleaning of blind holes and complex components.
机译:通过声音与液体(超声波和超音速)的相互作用进行清洁一直是灵感和争议的源泉。超声波和超音速并不是截然不同或相互竞争的技术,但实际上是连续的。两者都是基于在液体中传播的声波,从而产生压缩和稀疏的循环。液体撕裂会导致蒸汽填充的气泡。超声波和超音波之间的差异在于这些声波的频率。在较低的超声频率下,空化气泡(实际上是真空空隙)是相对瞬变的,会随着局部力和热量的产生而逐渐膨胀。在与超音速清洁相关的较高频率下,气泡更小,更稳定。在超音速清洗中,其他作用力(例如声流)更为重要。它的作用是定向“视线”,并且更适合晶圆制造。超声波清洗会产生多方向的“环绕声”,从而可以清洗盲孔和复杂的组件。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号