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SEM-EDS nanoanalysis of mineral composite materials: A Monte Carlo approach

机译：矿物复合材料的SEM纳米分析：蒙特卡罗方法

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A quantitative determination of chemical and mineral composition at the nanoscale is nowadays fundamental for the knowledge of properties of innovative composite materials. Scanning electron microscopy (SEM) equipped with energy dispersive X-ray spectrometry (EDS) is one of the most commonly employed spatially-resolved analytical methods, because of its versatility and great potential for nano-analysis. However, because of both complex architecture, texture and reduced grain sizes (micro-to-nano) in many composites, to avoid analytical errors, several effects related to electron and X-ray transport in solids must be considered. In the present work, a Monte Carlo SEM-EDS simulation approach is proposed and applied to selected micro-nanosized architectures usually found in composites. The effects of both micro-nanometric grain sizes (100 nm - 20 mu m) and basic geometrical shapes (cubic, hemicylindrical) of embedded features in the sample matrix (a metal matrix and a glass fibre-reinforced cementitious composite), together with a realistic SEM-EDS setup, were studied. The results evidenced a high dependence of the simulated X-ray spectra versus particles thickness and shape, beam energy and sample-to-detector configuration, which directly affect a correct analytical characterization. The Monte Carlo simulation allowed to investigate and control the physical phenomena affecting the measurement and eventually to determine the optimal SEM-EDS parameters.
机译：如今，纳米级化学和矿物组合物的定量测定是创新复合材料性能的基础。扫描电子显微镜（SEM）配备有能量分散X射线光谱法（EDS）是最常用的空间分辨分析方法之一，因为其多功能性和纳米分析的巨大潜力。然而，由于复杂的架构，纹理和降低的晶粒尺寸（微到纳米）在许多复合材料中，为了避免分析误差，必须考虑与电子和X射线传输相关的几种效果。在本作工作中，提出了一种蒙特卡罗SEM-EDS仿真方法，并应用于通常在复合材料中发现的选择的微纳米型架构。微纳米粒尺寸（100nm - 20μm）和基本几何形状（立方，半岩）在样品基质（金属基质和玻璃纤维增​​强水泥复合材料）中的嵌入特征的效果以及a研究了现实的SEM-EDS设置。结果证明了模拟X射线谱值与颗粒厚度和形状，梁能量和​​样品到检测器配置的高依赖性，这直接影响了正确的分析表征。蒙特卡罗模拟允许研究和控制影响测量的物理现象，最终确定最佳的SEM EDS参数。

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