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首页> 外文期刊>Computers & Industrial Engineering >Multiple response optimization in a fully automated FAB: an integrated tool and vehicle dispatching strategy
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Multiple response optimization in a fully automated FAB: an integrated tool and vehicle dispatching strategy

机译：全自动FAB中的多重响应优化：集成的工具和车辆调度策略

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摘要

In today's tight, competitive, and volatile market in semiconductor manufacturing, a successful semiconductor manufacturer has to look into multiple performance indices such as cycle time and on-time delivery. Effective dispatching mechanism is a widely used strategy to achieve these performance indices simultaneously. In the past, dispatching studies in semiconductor manufacturing have primarily focused on the level of tool dispatching. This paper presents an integrated tool and vehicle (ITV) dispatching strategy to consider multiple performance measures in a fully automated fab environment. The ITV dispatching strategy was developed using a state-dependent methodology and multiple response optimization. In order to build a simulation-based automated fab, an integrated modeling approach was proposed to automate both the manufacturing process and the automated material handling system. A case study based on a local fab is described to examine the performance impact of the ITV dispatching rule measured by cycle time, work-in-process, on-time delivery, and lot delivery time. The results of the simulation experiments and analysis show that the ITV dispatching rule is superior to the use of a static dispatching rule, consisting of an average of 15% improvement for on-time delivery and 5% for other performance measures. Furthermore, the proposed modeling framework features high-fidelity, real-time operations and re-configuration, and it can be easily used in other applications.
机译：在当今紧张，竞争激烈且瞬息万变的半导体制造市场中，成功的半导体制造商必须研究多个性能指标，例如周期时间和按时交货。有效的调度机制是同时实现这些性能指标的广泛使用的策略。过去，半导体制造中的调度研究主要集中在工具调度的水平上。本文提出了一种集成的工具和车辆（ITV）调度策略，以考虑在完全自动化的Fab环境中采用多种性能指标。 ITV调度策略是使用状态依赖的方法和多重响应优化来开发的。为了建立一个基于仿真的自动化晶圆厂，提出了一种集成建模方法来自动化制造过程和自动化材料处理系统。描述了一个基于本地晶圆厂的案例研究，以检查ITV调度规则对性能的影响，该规则通过周期时间，在制品，按时交付和批量交付时间来衡量。仿真实验和分析的结果表明，ITV调度规则优于静态调度规则，它在按时交付方面平均提高了15％，在其他性能指标上提高了5％。此外，所提出的建模框架具有高保真，实时操作和重新配置的特点，并且可以轻松地在其他应用程序中使用。

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