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Engineering of molecular architectures of β-diketonate precursors toward new advanced materials

机译:β-二酮酸酯前体的分子结构对新型先进材料的工程设计

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摘要

Metal complexes bearing linked hexafluoroacetylacetonates and ancillary Lewis ligands, have found wide interest as precursors for metal-organic chemical vapor deposition (MOCVD) since their first description in 1991. The relationships involving their molecular architectures, mass transport properties, decomposition mechanisms of both alkaline- and rare-earth metal precursors are compared to fluorine-free β-diketonates. The perspectives of applications to MOCVD processes of a large range of advanced materials in thin film forms are discussed in detail. The effects due to the nature of the β-diketonate moiety as well as of the ancillary ligand on mentioned properties are discussed in detail.
机译:自1991年首次描述以来,带有连接的六氟乙酰丙酮化物和辅助Lewis配体的金属络合物作为金属有机化学气相沉积(MOCVD)的前体已引起广泛关注。这些关系涉及它们的分子结构,质量传输性质,碱金属和金属的分解机理将稀土金属前体与不含氟的β-二酮酸盐进行了比较。详细讨论了薄膜形式的各种先进材料在MOCVD工艺中的应用前景。详细讨论了由于β-二酮酸部分以及辅助配体的性质对上述性质的影响。

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