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The role and effect of residual stress on pore generation during anodization of aluminium thin films

机译:残余应力对铝薄膜阳极氧化过程中气孔生成的作用和影响

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摘要

The role and effect of residual stress on pore generation of anodized aluminium oxide (AAO) have been investigated into anodizing the various-residual-stresses aluminium films. The plane stresses were characterised by X-ray diffraction with sin~2ψ method. The pore density roughly linearly increased with residual stress from 64.6 (-132.5 MPa) to 90.5 pores/μm~2 (135.9 MPa). However, the average pore size around 40 nm was not changed significantly except for the rougher film. The tensile residual stress lessened the compressive oxide growth stress to reduce MO plastic deformation for higher pore density. The findings provide new foundations for realizing MO films on silicon.
机译:已经研究了残余应力在阳极氧化铝(AAO)的孔生成中的作用和影响,以对各种残余应力的铝膜进行阳极氧化。用sin〜2ψ法通过X射线衍射表征了平面应力。孔隙密度随残余应力从64.6(-132.5 MPa)大致线性增加到90.5孔隙/μm〜2(135.9 MPa)。然而,除了较粗糙的膜以外,在40nm附近的平均孔径没有显着改变。拉伸残余应力降低了压缩氧化物的生长应力,从而降低了MO塑性变形,从而提高了孔密度。这些发现为在硅上实现MO膜提供了新的基础。

著录项

  • 来源
    《Corrosion science》 |2013年第9期|232-239|共8页
  • 作者

    M.W. Liao; C.K. Chung;

  • 作者单位

    Department of Mechanical Engineering and Centre for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 701, Taiwan, ROC;

    Department of Mechanical Engineering and Centre for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 701, Taiwan, ROC;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    A. Aluminium; B. X-ray diffraction; B. SEM; C. Anodic films; C. Oxidation;

    机译:A.铝B. X射线衍射;扫描电镜C.阳极膜;C.氧化;

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