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首页> 外文期刊>Defence Science Journal >Thermo-mechanical and Control Behaviour of Copper-based Shape Memory Alloy Bimorph Actuator towards the Development of Micro Positioning System
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Thermo-mechanical and Control Behaviour of Copper-based Shape Memory Alloy Bimorph Actuator towards the Development of Micro Positioning System

机译：铜基形状记忆合金双芯片致动器朝向微定位系统发展的热机械和控制行为

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A shape memory alloy (SMA) bimoiph actuator is a composite structure composed of flexible polyimide substrate and SMA thin film deposited using thermal evaporation technique. In this work, the substrate thickness in the range of 25 - 75 mu m was selected for the development of CuAlNiMn SMA bimorph actuator. An investigation on the control behavior of copper based SMA bimoiph towards the development of micro positioning system has been performed. The actuation behavior of the SMA bimoiph was studied using electrical actuation. Subsequently, a proportional integral derivative (PID) controller was designed to control the bimorph actuator with proper tuning of gain parameters. The displacement of the bimorph actuator was controlled through dedicated experimental setup consisted of laser displacement sensor, data acquisition system and Lab VIEW software. The CuAlNiMn SMA bimorph actuator resulted in a satisfying control performance which can be extended to MEMS applications. A preliminary prototype of the SMA bimorph actuator based micro positioning system has been developed.
机译：形状记忆合金（SMA）BimoIph致动器是由柔性聚酰亚胺基板和使用热蒸发技术沉积的SMA薄膜组成的复合结构。在这项工作中，选择在25-75μm范围内的基板厚度用于Cualnimn SMA Bimorph执行器的开发。已经进行了对微定位系统发展铜的SMA Bimoiph的控制行为的研究。使用电动致动研究了SMA Bimoiph的致动行为。随后，设计了一种比例积分衍生物（PID）控制器以控制Bimorph致动器，通过适当的增益参数调谐。通过专用的实验设置控制Bimorph执行器的位移，包括激光位移传感器，数据采集系统和实验室视图软件。 Cualnimn SMA Bimorph执行器导致满足的控制性能，可以扩展到MEMS应用。已经开发了基于SMA Bimorph致动器的微定位系统的初步原型。

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