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首页> 外文期刊>Bulletin of materials science >Effect of working pressure and annealing temperature on microstructure and surface chemical composition of barium strontium titanate films grown by pulsed laser deposition
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Effect of working pressure and annealing temperature on microstructure and surface chemical composition of barium strontium titanate films grown by pulsed laser deposition

机译：工作压力和退火温度对脉冲激光沉积钛酸锶钡薄膜微结构和表面化学成分的影响

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Barium strontium titanate (BST, Ba1a?’e?‘￥Sre?‘￥TiO3) thin films have been extensively used in many dielectric devices such as dynamic random access memories (DRAMs). To optimize its characteristics, a microstructural control is essential. In this paper, Ba0.6Sr0.4TiO3 thin film has been deposited on the SiO2/Si substrate by the pulsed laser deposition (PLD) technique at three different oxygen working pressures of 100, 220 and 350 mTorr. Then the deposited thin films at 100 mTorr oxygen pressure were annealed for 50 min in oxygen ambient at three different temperatures: 650, 720 and 800?°C. The effect of oxygen working pressure during laser ablation and thermal treatment on the films was investigated by using X-ray diffraction (XRD), atomic force microscopy (AFM) and scanning electron microscopy (SEM) analysis methods. X-ray photoelectron spectroscopy analysis was used to determine the surface chemical composition of the samples. The results indicate that the deposited BST film at low working pressure (100 mTorr) in PLD chamber shows a lower surface roughness than other working pressures (220 and 350 mTorr). The as-deposited films show an amorphous structure and would turn into polycrystalline structure at annealing temperature above 650?°C. Increase of temperature would cause the formation of cubic and per-ovskite phases, improvement in crystalline peaks and also result in the decomposition of BST at high temperature (above 800?°C). In addition, rising of temperature leads to the increase in size of grains and clusters. Therefore more roughness was found at higher temperatures as a result of a more heterogeneous growth and less tensions.
机译：钛酸锶钡（BST，Ba 1a？'e？'￥ Sr e？'￥ TiO 3 ）薄膜已被广泛用于许多介电设备，例如动态随机存取存储器（DRAM）。为了优化其特性，微结构控制是必不可少的。本文在SiO 2 / Si衬底上沉积了Ba 0.6 Sr 0.4 TiO 3 薄膜通过脉冲激光沉积（PLD）技术在100、220和350 mTorr的三种不同氧气工作压力下进行。然后将沉积的薄膜在100 mTorr的氧气压力下在氧气环境中于650、720和800°C的三种温度下退火50分钟。利用X射线衍射（XRD），原子力显微镜（AFM）和扫描电子显微镜（SEM）分析方法研究了激光烧蚀和热处理过程中氧气工作压力对薄膜的影响。 X射线光电子能谱分析用于确定样品的表面化学组成。结果表明，在PLD腔室中以低工作压力（100 mTorr）沉积的BST膜显示出比其他工作压力（220和350 mTorr）更低的表面粗糙度。沉积的膜显示出非晶结构，并且在高于650℃的退火温度下会变成多晶结构。温度升高会导致立方相和钙钛矿相的形成，结晶峰的改善，还会导致BST在高温（高于800°C）下分解。另外，温度升高导致晶粒和团簇的尺寸增加。因此，由于较高的非均质生长和较小的张力，在较高的温度下发现了更大的粗糙度。

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