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Photocatalytic Activity of Reactively Sputtered Titania Coatings Deposited Using a Full Face Erosion Magnetron

机译:全面腐蚀磁控管沉积的活性溅射二氧化钛涂层的光催化活性

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Titanium dioxide (titania) is widely used as a photocatalyst for its moderate band gap, high photoactivity, recyclability, nontoxicity, low cost and its significant chemical stability. The anatase phase of titania is known to show the highest photocatalytic activity, however, the presence of this phase alone is not sufficient for sustained activity. In this study TiO2 coatings were deposited onto glass substrates by mid-frequency pulsed magnetron sputtering from metallic targets in reactive mode using a Full Face Erosion (FFE) magnetron, which allows the magnetic field to be modulated during the deposition process. The as-deposited coatings were analysed by scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDX) and micro-Raman spectroscopy. Selected coatings were then annealed at temperatures in the range of 400–700 °C and re-analysed. The photocatalytic activity of the coatings was investigated through measurements of the degradation of organic dyes, such as methyl orange, under the influence of UV and fluorescent light sources. It has been demonstrated that, after annealing, the pulsed magnetron sputtering process produced photo-active surfaces and that the activity of the coatings under exposure to fluorescent lamps was some 35%–45% of that observed under exposure to UV lamps.
机译:二氧化钛(二氧化钛)因其带隙适中,光活性高,可回收性,无毒,成本低以及化学稳定性显着而被广泛用作光催化剂。已知二氧化钛的锐钛矿相显示出最高的光催化活性,但是,仅该相的存在不足以维持活性。在这项研究中,使用全脸冲蚀(FFE)磁控管通过中频脉冲磁控溅射从金属靶材以反应模式将TiO 2 涂层沉积到玻璃基板上,该磁控管可在扫描过程中调节磁场沉积过程。通过扫描电子显微镜(SEM),能量色散X射线光谱仪(EDX)和显微拉曼光谱仪分析沉积的涂层。然后将选定的涂层在400-700°C的温度范围内进行退火,然后进行重新分析。通过测量有机染料(如甲基橙)在紫外线和荧光光源的作用下的降解,研究了涂层的光催化活性。事实证明,退火后,脉冲磁控溅射工艺产生了光敏表面,并且涂层在荧光灯下的活性约为在紫外线灯下的活性的35%–45%。

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