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首页> 外文期刊>Computers >High-Precision Control of a Piezo-Driven Nanopositioner Using Fuzzy Logic Controllers ?
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High-Precision Control of a Piezo-Driven Nanopositioner Using Fuzzy Logic Controllers ?

机译：使用模糊逻辑控制器对压电驱动纳米定位器进行高精度控制

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This paper presents single- and dual-loop fuzzy control schemes to precisely control the piezo-driven nanopositioner in the x - and y -axis directions. Various issues are associated with this control problem, such as low stability margin due to the sharp resonant peak, nonlinear dynamics, parameter uncertainty, etc. As such, damping controllers are often utilised to damp the mechanical resonance of the nanopositioners. The Integral Resonant Controller (IRC) is used in this paper as a damping controller to damp the mechanical resonance. A further inherent problem is the hysteresis phenomenon (disturbance), which leads to degrading the positioning performance (accuracy) of the piezo-driven stage. The common approach to treat this disturbance is to invoke tracking controllers in a closed-loop feedback scheme in conjunction with the damping controllers. The traditional approach uses the Integral Controller (I) or Proportional Integral (PI) as a tracking controller, whereas this paper introduces the Proportional and Integral (PI)-like Fuzzy Logic Controller (FLC) as a tracking controller. The effectiveness of the proposed control schemes over conventional schemes is confirmed through comparative simulation studies, and results are presented. The stability boundaries of the proposed control schemes are determined in the same way as with a conventional controller. Robustness against variations in the resonant frequency of the proposed control schemes is verified.
机译：本文提出了单环和双环模糊控制方案，以在x和y轴方向上精确控制压电驱动纳米定位器。与该控制问题相关的各种问题，例如由于尖锐的共振峰，非线性动力学，参数不确定性等导致的低稳定性裕度。因此，阻尼控制器通常用于阻尼纳米定位器的机械共振。本文使用积分谐振控制器（IRC）作为阻尼控制器来衰减机械谐振。另一个固有的问题是磁滞现象（干扰），这会导致压电驱动平台的定位性能（精度）降低。处理这种干扰的常用方法是与阻尼控制器一起以闭环反馈方案调用跟踪控制器。传统方法使用积分控制器（I）或比例积分（PI）作为跟踪控制器，而本文则介绍类似比例积分（PI）的模糊逻辑控制器（FLC）作为跟踪控制器。通过比较仿真研究证实了所提出的控制方案相对于常规方案的有效性，并给出了结果。以与常规控制器相同的方式确定所提出的控制方案的稳定性边界。验证了针对所提出的控制方案的谐振频率变化的鲁棒性。

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