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Dielectric Properties of SnO2Thin Film Using SPR Technique for Gas Sensing Applications

机译:SPR技术在气敏应用中SnO2薄膜的介电性能

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Focus has been made on the determination of dielectric constant of thin dielectric layer (SnO2thin film) using surface plasmon resonance (SPR) technique and exploiting it for the detection of NH3gas. SnO2thin film has been deposited by rf-sputtering technique on gold coated glass prism (BK-7) and its SPR response was measured in the Kretschmann configuration of attenuated total reflection using a p-polarised light beam at 633 nm wavelength. The SPR response of bilayer film was fitted with Fresnel’s equations in order to calculate the dielectric constant of SnO2thin film. The air/SnO2/Au/prim system has been utilized for detecting varying concentration (500 ppm to 2000 ppm) of NH3gas at room temperature using SPR technique. SPR curve shows significant shift in resonance angle from 44.8° to 56.7° on exposure of fixed concentration of NH3gas (500 ppm to 2000 ppm) with very fast response and recovery speeds.
机译:使用表面等离振子共振(SPR)技术确定薄介电层(SnO2薄膜)的介电常数并将其用于检测NH3气体已成为研究的重点。 Snr2thin薄膜已通过射频溅射技术沉积在镀金玻璃棱镜(BK-7)上,并使用633nm波长的p偏振光束在Kretschmann衰减全反射的Kretschmann配置中测量了其SPR响应。为了计算SnO2薄膜的介电常数,将双层薄膜的SPR响应与Fresnel方程拟合。空气/ SnO2 / Au / prim系统已被用于通过SPR技术在室温下检测变化浓度的氨气(500 ppm至2000 ppm)。 SPR曲线显示,在固定浓度的NH3气体(500 ppm至2000 ppm)下,共振角从44.8°到56.7°发生了显着变化,响应和恢复速度非常快。

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