X‐Ray Optics: 3D Nanofabrication of High‐Resolution Multilayer Fresnel Zone Plates (Adv. Sci. 9/2018)

Umut Tunca Sanli; Chengge Jiao; Margarita Baluktsian; Corinne Grévent; Kersten Hahn; Yi Wang; Vesna Srot; Gunther Richter; Iuliia Bykova; Markus Weigand; Gisela Schütz; Kahraman Keskinbora

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X‐Ray Optics: 3D Nanofabrication of High‐Resolution Multilayer Fresnel Zone Plates (Adv. Sci. 9/2018)

机译：X-Ray Optics：高分辨率多层菲涅耳波带片的3D纳米加工（Adv。Sci。9/2018）

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In article 1800346 , Umut Tunca Sanli, Kahraman Keskinbora, and co‐workers fabricate multilayer Fresnel zone plate (ML‐FZP) type X‐ray lenses on optical fibers by depositing several hundred alternating layers of oxide super‐structures. 15 nm wide structures of a test object are resolved using the built X‐ray lenses. Moreover, a plasma focused ion beam is used for preparing micro‐pillar arrays with precise tapering angles enabling ML‐FZPs with zones precisely tilted to the Bragg angle.

机译：在文章1800346中，Umut Tunca Sanli，Kahraman Keskinbora及其同事通过在光纤上沉积了数百个交替的氧化物超结构层，在光纤上制造了多层菲涅耳波带片（ML-FZP）型X射线透镜。使用内置的X射线透镜可分辨15纳米宽的测试对象结构。此外，等离子体聚焦离子束用于制备具有精确锥角的微柱阵列，从而使ML-FZP的区域精确倾斜至布拉格角。

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《Advanced Science》 |2018年第9期|共1页
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Umut Tunca Sanli; Chengge Jiao; Margarita Baluktsian; Corinne Grévent; Kersten Hahn; Yi Wang; Vesna Srot; Gunther Richter; Iuliia Bykova; Markus Weigand; Gisela Schütz; Kahraman Keskinbora;
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1. 3D Nanofabrication of High‐Resolution Multilayer Fresnel Zone Plates [J] . Umut Tunca Sanli, Chengge Jiao, Margarita Baluktsian, Advanced Science . 2018,第9期

机译：高分辨率多层菲涅耳波带片的3D纳米加工
2. Nanofabrication of Fresnel zone plate lenses for X-ray optics [J] . Joan Vila-Comamala, Xavier Borrise, Francesc Perez-Murano, Microelectronic Engineering . 2006,第4a9期

机译：用于X射线光学器件的菲涅耳波带片透镜的纳米加工
3. Volumetric Nanoscale Imaging: Hard X‐Ray Nanoholotomography: Large‐Scale, Label‐Free, 3D Neuroimaging beyond Optical Limit (Adv. Sci. 6/2018) [J] . Anna Khimchenko, Christos Bikis, Alexandra Pacureanu, Advanced Science . 2018,第6期

机译：体积纳米级成像：硬X射线纳米全息照相术：超出光学极限的大规模，无标签3D神经成像（Adv。Sci.6 / 2018）
4. High resolution, high efficiency multilayer Fresnel zone plates for soft and hard X-rays [C] . Umut Tunca Sanli, Kahraman Keskinbora, Keith Gregorczyk, Conference on X-Ray Nanoimaging: Instruments and Methods . 2015

机译：高分辨率和高效率的多层菲涅耳波带片，用于软X射线和硬X射线
5. Nanofabrication of Fresnel zone plates for soft X -ray imaging at carbon edge [D] . Lu, Ming 2006

机译：菲涅耳波带片的纳米制造，用于碳边缘的软X射线成像
6. X‐Ray Optics: 3D Nanofabrication of High‐Resolution Multilayer Fresnel Zone Plates (Adv. Sci. 9/2018) [O] . Umut Tunca Sanli, Chengge Jiao, Margarita Baluktsian, 2018

机译：X‐Ray Optics：高分辨率多层菲涅耳波带片的3D纳米加工（Adv。Sci.9 / 2018）
7. 3D Nanofabrication of High-Resolution Multilayer Fresnel Zone Plates [O] . Umut Tunca Sanli, Chengge Jiao, Margarita Baluktsian, 2018

机译：3D高分辨率多层菲涅耳区板的纳米制作

X‐Ray Optics: 3D Nanofabrication of High‐Resolution Multilayer Fresnel Zone Plates (Adv. Sci. 9/2018)

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