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首页> 外文期刊>Advances in Mechanical Engineering >Design and testing of a novel flexure-based 3-degree-of-freedom elliptical microano-positioning motion stage:
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Design and testing of a novel flexure-based 3-degree-of-freedom elliptical microano-positioning motion stage:

机译：一种基于挠曲的新型3自由度椭圆微/纳米定位运动平台的设计和测试：

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摘要

In this article, a novel flexure-based 3-degree-of-freedom elliptical microano-positioning motion stage was developed to obtain translation motions along the x, y, and z directions with high working bandwidth. The stage was configurations with a XYZ vertical motion to ensure the crosstalk between each axis is small enough. The motion stage was driven by three piezoelectric actuators. The corresponding working principles and stiffness modeling were detailed in this article. In addition, experimental testing was conducted to investigate the performances of the motion stage. The obtained strokes in x, y, and z directions are 10.39, 15.43, and 15.55?μm, respectively. The response rise time for each axis is within 10?ms, and the maximum crosstalk all within 1.2% ensured the rapid tracking can be achieved.
机译：在本文中，开发了一种基于挠曲的新型3自由度椭圆微/纳米定位运动平台，以在高工作带宽下获得沿x，y和z方向的平移运动。该平台具有XYZ垂直运动的配置，以确保每个轴之间的串扰足够小。运动平台由三个压电致动器驱动。本文详细介绍了相应的工作原理和刚度建模。另外，进行了实验测试以研究运动台的性能。在x，y和z方向上获得的笔触分别为10.39、15.43和15.55？μm。每个轴的响应上升时间在10µms之内，最大串扰均在1.2％之内，从而确保了快速跟踪。

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