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首页> 外文期刊>Applied Nanoscience >Highly uniform residual layers for arrays of 3D nanoimprinted cavities in Fabry–Pérot-filter-array-based nanospectrometers
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Highly uniform residual layers for arrays of 3D nanoimprinted cavities in Fabry–Pérot-filter-array-based nanospectrometers

机译：基于Fabry–Pérot滤镜阵列的纳米光谱仪中3D纳米压印腔阵列的高度均匀的残留层

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Miniaturized optical spectrometers can be implemented by an array of Fabry–Pérot (FP) filters. FP filters are composed of two highly reflecting parallel mirrors and a resonance cavity. Each filter transmits a small spectral band (filter line) depending on its individual cavity height. The optical nanospectrometer, a miniaturized FP-based spectrometer, implements 3D NanoImprint technology for the fabrication of multiple FP filter cavities in a single process step. However, it is challenging to avoid the dependency of residual layer (RL) thickness on the shape of the printed patterns in NanoImprint. Since in a nanospectrometer the filter cavities vary in height between neighboring FP filters and, thus, the volume of each cavity varies causing that the RL varies slightly or noticeably between different filters. This is one of the few disadvantages of NanoImprint using soft templates such as substrate conformal imprint lithography which is used in this paper. The advantages of large area soft templates can be revealed substantially if the problem of laterally inhomogeneous RLs can be avoided or reduced considerably. In the case of the nanospectrometer, non-uniform RLs lead to random variations in the designed cavity heights resulting in the shift of desired filter lines. To achieve highly uniform RLs, we report a volume-equalized template design with the lateral distribution of 64 different cavity heights into several units with each unit comprising four cavity heights. The average volume of each unit is kept constant to obtain uniform filling of imprint material per unit area. The imprint results, based on the volume-equalized template, demonstrate highly uniform RLs of 110?nm thickness.
机译：小型化的光谱仪可以通过一系列的法布里-珀罗（FP）滤光片来实现。 FP滤镜由两个高反射平行镜和一个谐振腔组成。每个滤光片根据其各自的腔体高度传输一条小的光谱带（滤光片线）。光学纳米光谱仪是一种基于FP的小型化光谱仪，它实现3D NanoImprint技术，可在单个处理步骤中制造多个FP滤光片腔。但是，要避免残留层（RL）的厚度与NanoImprint中印刷图案的形状有关，具有挑战性。由于在纳米光谱仪中，过滤器腔在相邻的FP过滤器之间的高度会发生变化，因此每个腔的体积都会发生变化，从而导致RL在不同的过滤器之间略微或明显地变化。这是使用软模板（例如，本文使用的基板保形压印光刻）进行纳米压印的少数缺点之一。如果可以避免或显着减少横向不均匀RL的问题，则可以充分展现大面积软模板的优势。在纳米光谱仪的情况下，不均匀的RL导致设计腔体高度的随机变化，从而导致所需滤线的移动。为了实现高度均匀的RL，我们报告了一种体积均衡的模板设计，其中将64个不同腔高度的横向分布分成几个单元，每个单元包含四个腔高度。每个单元的平均体积保持恒定，以使每单位面积的压印材料均匀填充。基于体积均衡模板的压印结果表明，RLs具有高度均匀的110？nm厚度。

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