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β-Ga2O3 Particles Formed of a Complex Organic by Electrolysis

机译:复杂有机物通过电解形成β-Ga 2 O 3 颗粒

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Gallium oxide particles were obtained by electrolysis from a complex of gallium-carbohydrazide,using as electrolyte ethanol and subsequently annealing at 900 C in N2, O2, or O3 atmosphere during 1hr. The particles were deposited on c-Si wafers for 30 minutes with a current density of 15 mA cm-2.Heat treatment breaks down the complex and lead to the formation of Ga2O3, but the amount of oxideformed is modified according to the atmosphere of treatment. It is observed the semiconductor materialformation in presence of oxygen, and to a lesser extent in nitrogen or ozone atmospheres. Theinfluence of annealing atmosphere is reflected in the surface morphology and the optical properties ofGa2O3 particles, which were investigated by X-ray diffraction (XRD), energy dispersive X-ray (EDS),micro-Raman and UV-Vis spectroscopy.
机译:氧化镓颗粒是通过从碳酰肼镓的络合物中电解得到的,用作乙醇,然后在N2,O2或O3气氛中于900℃退火1小时。颗粒以15 mA cm-2的电流密度沉积在c-Si晶片上30分钟,热处理使复合物分解并导致形成Ga2O3,但根据处理气氛改变了形成的氧化物量。观察到在氧存在下半导体材料形成,并且在氮气或臭氧气氛中程度较小。通过X射线衍射(XRD),能量色散X射线(EDS),微拉曼光谱和紫外可见光谱研究了退火气氛对Ga2O3颗粒表面形貌和光学性能的影响。

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