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首页> 外文期刊>International Journal of Environmental Research and Public Health >Real-Time Measurements and Characterization of Airborne Particulate Matter from a Primary Silicon Carbide Production Plant
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Real-Time Measurements and Characterization of Airborne Particulate Matter from a Primary Silicon Carbide Production Plant

机译:一次碳化硅生产厂中空气中颗粒物的实时测量和表征

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Airborne particulate matter in the silicon carbide (SiC) industry is a known health hazard. The aims of this study were to elucidate whether the particulate matter generated inside the Acheson furnace during active operation is representative of the overall particulate matter in the furnace hall, and whether the Acheson furnaces are the main sources of ultrafine particles (UFP) in primary SiC production. The number concentration of ultrafine particles was evaluated using an Electrical Low Pressure Impactor (ELPI TM , Dekati Ltd., Tampere, Finland), a Fast Mobility Particle Sizer (FMPS TM , TSI, Shoreview, MN, USA) and a Condensation Particle Counter (CPC, TSI, Shoreview, MN, USA). The results are discussed in terms of particle number concentration, particle size distribution and are also characterized by means of electron microscopy (TEM/SEM). Two locations were investigated; the industrial Acheson process furnace hall and a pilot furnace hall; both of which represent an active operating furnace. The geometric mean of the particle number concentration in the Acheson process furnace hall was 7.7 ???? 10 4 particles/cm 3 for the UFP fraction and 1.0 ???? 10 5 particles/cm 3 for the submicrometre fraction. Particulate matter collected at the two sites was analysed by electron microscopy. The PM from the Acheson process furnace hall is dominated by carbonaceous particles while the samples collected near the pilot furnace are primarily rich in silicon.
机译:碳化硅(SiC)工业中的空气传播颗粒物是已知的健康危害。本研究的目的是阐明主动运行期间在Acheson炉内部产生的颗粒物是否代表了炉膛内的整体颗粒物,以及Acheson炉是否是原始SiC中超细颗粒(UFP)的主要来源。生产。使用电动低压撞击器(ELPI TM,Dekati Ltd.,坦佩雷,芬兰),快速移动粒度仪(FMPS TM,TSI,Shoreview,MN,美国)和冷凝粒子计数器( CPC,TSI,Shoreview,MN,美国)。根据颗粒数浓度,颗粒大小分布讨论了结果,并通过电子显微镜(TEM / SEM)对结果进行了表征。调查了两个地点;工业Acheson工艺炉大厅和中试炉大厅;两者都代表一个正在运行的熔炉。 Acheson工艺炉大厅中颗粒数浓度的几何平均值为7.7 ????。 UFP分数为10 4颗粒/ cm 3,为1.0 ????亚微米级分为10 5颗粒/ cm 3。通过电子显微镜分析在两个位置收集的颗粒物。来自Acheson工艺炉大厅的PM以碳质颗粒为主,而在中试炉附近收集的样品主要富含硅。

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