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Birefringence simulations of single crystals

机译：单晶的双折射模拟

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Fluoride single crystals such as calcium fluoride (CaF_(2)) belonging to the cubic crystal system and magnesium fluoride (MgF_(2)) belonging to the tetragonal crystal system are utilized as optical elements in high power lithography systems. In such uses of the single crystals, birefringence is an important phenomenon that affects optical performance. Based on the papers published by the present authors, we review the birefringence of CaF_(2) and MgF_(2) single crystals. Intrinsic birefringence is dealt with in addition to stress birefringence. First of all calculation methods for stress birefringence are presented. They are the Jones calculus, an exact method, and the average stress method, an approximate method, and the relation between the two methods is given. In the stress birefringence simulations after annealing of CaF_(2) single crystal, the importance of time-dependent nonlinear deformation behavior of a material called creep is pointed out in calculating residual stress that induces stress birefringence. When the wavelength of light becomes down to the vacuum ultraviolet region, CaF_(2) single crystal shows intrinsic birefringence in addition to stress birefringence. Birefringence simulations of a CaF_(2) single crystal chamber window of an ArF excimer laser light source are performed by considering both stress birefringence and intrinsic birefringence to evaluate the optical performance and to obtain the optimum condition of CaF_(2) single crystal window. MgF_(2) single crystal shows intrinsic birefringence even for visible light because of its strong crystal anisotropy. The results of birefringence analyses are shown for MgF_(2) single crystal as an example of combining stress birefringence with intrinsic birefringence under a visible light condition.
机译：在大功率光刻系统中，诸如立方晶系的氟化钙（CaF_（2））和四方晶系的氟化镁（MgF_（2））等氟化物单晶被用作光学元件。在单晶的这种用途中，双折射是影响光学性能的重要现象。基于目前作者发表的论文，我们回顾了CaF_（2）和MgF_（2）单晶的双折射。除了应力双折射外，还处理固有双折射。首先介绍了应力双折射的计算方法。它们是琼斯演算，一种精确方法，以及平均应力方法，一种近似方法，并给出了这两种方法之间的关系。在CaF_（2）单晶退火后的应力双折射模拟中，指出了一种称为蠕变的材料随时间变化的非线性变形行为在计算引起应力双折射的残余应力中的重要性。当光的波长下降到真空紫外区域时，CaF_（2）单晶除应力双折射外还显示出固有的双折射。通过考虑应力双折射和固有双折射来评估光学性能并获得CaF_（2）单晶窗口的最佳条件，对ArF准分子激光光源的CaF_（2）单晶腔室窗口进行双折射模拟。 MgF_（2）单晶由于其强烈的晶体各向异性，即使对于可见光也显示出固有的双折射。以MgF_（2）单晶的双折射分析结果为例，显示了在可见光条件下将应力双折射与固有双折射相结合的示例。

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