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Micro-Fabricated Resonator Based on Inscribing a Meandered-Line Coupling Capacitor in an Air-Bridged Circular Spiral Inductor

机译：基于在空气桥接圆形螺旋电感器中弯折线耦合电容器的微细谐振器

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This letter presents a high-performance micro-fabricated resonator based on inscribing a meandered-line square coupling capacitor in an air-bridged circular spiral inductor on the GaAs-integrated passive device (IPD) technology. The main advantages of the proposed method, which inserts a highly effective coupling capacitor between the two halves of a circular spiral inductor, are the miniaturized size, enhanced coupling coefficient, and improved selectivity. Moreover, using an air-bridge structure utilizes the enhanced mutual inductance in which it maximizes the self-inductance by a stacking inductor layout to obtain a high coupling effect. The simulated and measured S-parameters of a prototype resonator with an effective overall circuit size of 1000 μm × 800 μm are in good agreement. The measured insertion and return losses of 0.41 and 24.21 dB, respectively, at a measured central frequency of 1.627 GHz, as well as an upper band transmission zero with a suppression level of 38.7 dB, indicate the excellent selectivity of the developed resonator.
机译：这封信提出了一种高性能的微型谐振器，该谐振器基于GaAs集成无源器件（IPD）技术上的空气桥接圆形螺旋电感器中的弯折线型方形耦合电容器。所提出的方法的主要优点是在圆形螺旋电感器的两半之间插入了一个高效的耦合电容器，它的尺寸最小，耦合系数提高，选择性提高。此外，使用气桥结构利用增强的互感，其中通过堆叠电感器布局，其使自感最大化，以获得高耦合效果。有效电路总尺寸为1000μm×800μm的原型谐振器的仿真和测量S参数非常吻合。在测得的中心频率1.627 GHz处测得的插入损耗和回波损耗分别为0.41和24.21 dB，以及抑制水平为38.7 dB的高频带传输零，表明该谐振器具有出色的选择性。

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