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Characterization of Surface Micro-Roughness by Off-Specular Measurements of Polarized Optical Scattering

机译：通过偏光散射的非镜面测量表征表面微粗糙度

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The characterization of surface micro-roughness is investigated by using off-specular measurements of polarized optical scattering. In the measurement system, the detection angles of optical scattering are defined by the vertical and level scattering angles. The rotating mechanism of angles is controlled by stepper motors. Waveplate and polarizer are used to adjust light polarization and detection. We conduct the optical scattering measurements by using four standard metal sheets of surface roughness. The nominal values (Ra) of standard micro-roughness are 1.6 μm, 0.8 μm, 0.4 μm, and 0.1 μm, respectively. Samples with different surface roughness are evaluated with the utilization of laser sources at three incident wavelengths. These polarized images are analyzed using a computer program to obtain the distribution of light intensity. The results show great correlation between the metal surface roughness and polarization states. This measurement system can be used to quickly and accurately distinguish between different surfaces and properties.
机译：通过使用偏光散射的镜外测量来研究表面微粗糙度的特征。在测量系统中，光学散射的检测角度由垂直和水平散射角度定义。角的旋转机构由步进电机控制。波片和偏振器用于调整光的偏振和检测。我们使用表面粗糙度的四个标准金属板进行光散射测量。标准微粗糙度的标称值（Ra）分别为1.6μm，0.8μm，0.4μm和0.1μm。利用三个入射波长的激光源评估具有不同表面粗糙度的样品。使用计算机程序分析这些偏振图像，以获得光强度的分布。结果表明金属表面粗糙度和极化状态之间有很大的相关性。该测量系统可用于快速准确地区分不同的表面和特性。

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