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首页> 外文期刊>Micro and Nano Systems Letters >Effects of a micro pattern on Cu alloy electrodeposition and its application as an oil detector
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Effects of a micro pattern on Cu alloy electrodeposition and its application as an oil detector

机译：微观图案对铜合金电沉积的影响及其在测油中的应用

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摘要

In this study, the effects of open area ratio (OAR) variations by micro-patterns on Cu alloy electrodeposition were analyzed experimentally. To change the OAR of the samples, a strip-type micro-pattern was formed on a substrate through a photolithography process. Moreover, the OAR was controlled by adjusting the distance of the stripe pattern to a width of 20?μm. When electrodeposition was applied on a non-patterned substrate with an OAR of 100%, a pillar-type Cu alloy structure was produced. In addition, when the OAR was decreased to 40%, the height of the Cu alloy structures was increased. However, when the OAR was decreased to 20%, no electrodeposited structures were formed. To confirm the industrial effectiveness of the electrodeposited structures on a micro-pattern, the Cu alloy electrodeposited structures were applied to the formation of an oil detector.
机译：在这项研究中，实验分析了微图案的开口率（OAR）变化对Cu合金电沉积的影响。为了改变样品的OAR，通过光刻工艺在基板上形成条形微图案。此外，通过将条纹图案的距离调整为20μm的宽度来控制OAR。当将电沉积施加到OAR为100％的无图案衬底上时，会产生柱型Cu合金结构。另外，当OAR降低到40％时，Cu合金结构的高度增加。然而，当OAR降低至20％时，没有形成电沉积结构。为了确认微图案上的电沉积结构的工业有效性，将铜合金电沉积结构应用于油检测器的形成。

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