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首页> 外文期刊>Micro and Nano Systems Letters >MEMS-based Ni–B probe with enhanced mechanical properties for fine pitch testing
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MEMS-based Ni–B probe with enhanced mechanical properties for fine pitch testing

机译：基于MEMS的Ni–B探针，具有增强的机械性能，可用于细间距测试

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We fabricated and characterized microelectromechanical systems (MEMS)-based Ni–B probes with enhanced mechanical properties for fine pitch testing. The Ni–B micro-probes were compared with conventional Ni–Co micro-probes in terms of the mechanical performance and thermal effect. The elastic modulus and hardness of Ni–B were found to be 240.4 and 10.9 GPa, respectively, which surpass those of Ni–Co. The Ni–B micro-probes had a higher contact force than the Ni–Co micro-probes by an average of 41.38% owing to the higher elastic modulus. The Ni–B micro-probes had a lower average permanent deformation than the Ni–Co micro-probes after the same overdrive was applied for 1?h by 56.58?μm. The temperature was found to have a negligible effect on the Ni–B micro-probes. These results show that Ni–B micro-probes are useful for fine pitch testing and a potential candidate for replacing conventional Ni–Co micro-probes owing to their advanced mechanical and thermal characteristics.
机译：我们制造并表征了基于微机电系统（MEMS）的Ni-B探针，这些探针具有增强的机械性能，可用于细间距测试。在机械性能和热效应方面，将Ni-B微型探针与常规Ni-Co微型探针进行了比较。 Ni-B的弹性模量和硬度分别为240.4和10.9 GPa，超过了Ni-Co。由于较高的弹性模量，Ni-B微探针的接触力比Ni-Co微探针平均高41.38％。在相同的过驱动作用下施加1？h 56.58？μm后，Ni-B微探针的平均永久变形低于Ni-Co微探针。发现温度对Ni-B微探针的影响可忽略不计。这些结果表明，由于其先进的机械和热学特性，Ni-B微型探针可用于细间距测试，并且有望替代传统的Ni-Co微型探针。

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