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首页> 外文期刊>Results in Physics >Effect of crucible rotation and crystal rotation on the oxygen distribution at the solid-liquid interface during the growth of Czochralski monocrystalline silicon under superconducting horizontal magnetic field
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Effect of crucible rotation and crystal rotation on the oxygen distribution at the solid-liquid interface during the growth of Czochralski monocrystalline silicon under superconducting horizontal magnetic field

机译：超导水平磁场作用下Czochralski单晶硅生长过程中坩埚旋转和晶体旋转对固液界面氧分布的影响

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摘要

This paper presents incorporating superconducting horizontal magnetic field, a very effective way with low power consumption and high field strength. To improve crystal quality of large diameter Czochralski monocrystalline silicon (CZ-Si) when it grows and to accurately describe the influential process parameters of oxygen distribution on the solid-liquid interface, 3D simulation is running on together with 2D/3D hybrid model established for obtaining boundary conditions. Compared with conventional horizontal magnetic field, the superconducting horizontal magnetic field shows that the increasing magnetic induction intensity helps to adjust the shape of solid-liquid interface, to reduce the oxygen content at the interface and to improve the uniformity of radial oxygen distribution. Further, when crucible is large and melt is deep, the low crucible rotation speed or the low crystal rotation speed is favorable for reducing the oxygen content at the interface. Suitable magnetic induction, low crucible and low crystal rotation speed processes are more conducive to improving the uniformity of the radial oxygen distribution at the interface during the growth. Finally, simulation and experiment results show the effectiveness for the proposed method.
机译：本文提出了结合超导水平磁场的方法，这是一种非常有效的方法，具有低功耗和高场强的特点。为了提高大直径切克劳斯基单晶硅（CZ-Si）的晶体质量，并准确描述氧在固液界面上的分布过程参数，正在进行3D仿真，并建立了2D / 3D混合模型，获得边界条件。与常规水平磁场相比，超导水平磁场表明，增加的磁感应强度有助于调整固液界面的形状，减少界面处的氧含量并改善径向氧分布的均匀性。此外，当坩埚大且熔体深时，低坩埚旋转速度或低晶体旋转速度有利于降低界面处的氧含量。合适的磁感应，低坩埚和低晶体转速过程更有利于在生长过程中改善界面处径向氧分布的均匀性。最后，仿真和实验结果表明了该方法的有效性。

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