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首页> 外文期刊>Open Journal of Applied Sciences >Effect of Seed Size, Suspension Recycling and Substrate Pre-Treatment on the CVD Growth of Diamond Coatings
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Effect of Seed Size, Suspension Recycling and Substrate Pre-Treatment on the CVD Growth of Diamond Coatings

机译：种子大小，悬浮液回收和基材预处理对金刚石涂层CVD生长的影响

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CVD growth of uniform conformal polycrystalline diamond (PCD) coatings over complex three dimensional structures is very important material processing technique. It has been found that the nucleation and subsequent growth period is very critical for successful development of CVD diamond based technologies. There are many methods of enhancing diamond nucleation on foreign substrates-ultrasonic treatment with diamond seed suspension being the best among them. A combination of ultrasonic seeding (US) technique with prior treatment (PT) of the substrate under CVD diamond growth conditions for brief period of time, has found to be very effective in enhancing the diamond nucleation during CVD growth—together they are known as NNP. But successive usage of the same seeding suspension up to ten cycles deteriorates the seeding efficiency. 6th seeding cycle onwards the silicon substrates are barely get covered by diamond crystallites. Five different diamond micron grits were used for seeding the silicon substrates and it is observed that US with the sub-micron particles (0.25 μm) is very effective in efficient nucleation of PCD on Si substrates. PT of the substrate somewhat negates the effect of successive use of the same seeding slurry but it is best to avoid recycling of the same seeding suspension using micron size diamond grits.
机译：在复杂的三维结构上进行均匀的共形多晶金刚石（PCD）涂层的CVD生长是非常重要的材料加工技术。已经发现，成核和随后的生长时期对于成功开发基于CVD金刚石的技术非常关键。有许多方法可以增强在外来基质上的金刚石成核作用，其中超声波处理以金刚石种子悬浮液为最佳，其中超声处理是其中最好的方法。已发现将超声播种（US）技术与在CVD金刚石生长条件下短时间进行衬底的先处理（PT）相结合，对于增强CVD生长过程中的金刚石成核作用非常有效-统称为NNP 。但是，连续使用相同的播种悬浮液长达十个循环会降低播种效率。从第6个播种周期开始，几乎没有金刚石微晶覆盖硅衬底。使用五种不同的金刚石微米粒度对硅衬底进行晶种，并且观察到具有亚微米颗粒（0.25μm）的US在PC衬底上有效成核时非常有效。基材的PT在某种程度上抵消了连续使用相同种子浆料的影响，但最好避免使用微米级金刚石砂粒回收相同种子悬浮液。

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