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Research on single point diamond turning of chalcogenide glass aspheric lens

机译：硫族化物玻璃非球面镜片的单点金刚石车削研究

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Chalcogenide glass (ChG) Ge22Se58As20is a significant material in infrared optical systems, and it is usually machined by ultraprecision single point diamond turning (SPDT) for aspheric lens and freeform surface. However, as a soft brittle material, the surface is easily cracked during cutting. With the increasing demand for imaging quality, the surface integrity of chalcogenide glasses becomes increasingly important. This paper proposes a method to achieve high-precision and high-efficiency aspheric lens by SPDT. First, to study the material properties, the Vickers hardness of Ge22Se58As20is tested, and the element components and microstructure are analysed by EDS. Second, through orthogonal cutting, the critical cutting thickness of the brittle-ductile transition is tested to be 1.2 μm and the minimum depth of cut for chip formation of 100 nm is identified. The material removal rate under ductile machining in face turning was calculated. Finally, by optimizing the machining condition, an aspheric lens with surface roughness of Ra 6.47 nm and form error of PV 120.82 nm was successfully fabricated.
机译：硫族化物玻璃（ChG）Ge22Se58As20是红外光学系统中的重要材料，通常通过超精密单点金刚石车削（SPDT）加工非球面透镜和自由曲面。但是，作为柔软的脆性材料，在切割时表面容易破裂。随着对成像质量的日益增长的要求，硫族化物玻璃的表面完整性变得越来越重要。本文提出了一种利用SPDT实现高精度，高效率的非球面透镜的方法。首先，为了研究材料性能，测试了Ge22Se58As20的维氏硬度，并通过EDS分析了元素成分和微观结构。其次，通过正交切削，将脆性-韧性转变的临界切削厚度测试为1.2μm，并确定切屑形成的最小切削深度为100 nm。计算了端面车削时延性加工的材料去除率。最后，通过优化加工条件，成功地制备了表面粗糙度为Ra 6.47 nm，PV误差为120.82 nm的非球面透镜。

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