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首页> 外文期刊>World Journal of Mechanics >Porous Silicon as Soft Material in Low-Frequency MEMS (MicroElectro-Mechanical Systems) Resonators
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Porous Silicon as Soft Material in Low-Frequency MEMS (MicroElectro-Mechanical Systems) Resonators

机译：多孔硅作为低频MEMS（微机电系统）谐振器中的软材料

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This study focuses on the mechanical response of silicon on porous silicon bilayer cantilevers ended with a seismic mass. The porous silicon is intended to provide an alternative to decrease the cantilever stiffness for low-frequency MEMS applications. The first eigenfrequency of the cantilever is obtained using static deflection obtained under classical Euler-Bernoulli assumptions and Rayleigh method. In order to estimate the errors due to small-strain approximation and Euler-Bernoulli theory, the analytical results were validated through 3D finite element simulations for different cantilever geometries and porosities. Both bulk silicon and silicon on porous silicon bilayer cantilevers ended with a seismic mass were fabricated and we measured the first eigenfrequency ( f _(0)) and quality factor ( Q ) by using a laser Doppler vibrometer. In agreement with the theoretical predictions we found that, when compared to bulk silicon cantilevers, the first eigenfrequency of a bilayer cantilever containing 6% porous silicon (at 50% porosity) on 94% bulk silicon is lowered by 5%, from (5447 ± 120) Hz to ≈ 5198 Hz. This decrease is also accompanied by a reduction of the quality factor by two.
机译：这项研究集中在以地震质量结束的多孔硅双层悬臂上硅的机械响应。多孔硅旨在为降低低频MEMS应用的悬臂刚度提供替代方案。悬臂的第一本征频率是使用在经典Euler-Bernoulli假设和瑞利方法下获得的静态挠度获得的。为了估计由于小应变近似和Euler-Bernoulli理论引起的误差，通过3D有限元模拟对不同悬臂几何形状和孔隙率的分析结果进行了验证。都制造了块状硅和多孔硅双层悬臂梁，并以地震质量结束，并且我们使用激光多普勒振动计测量了第一本征频率（f _（0））和品质因数（Q）。与理论预测相符，我们发现，与块状硅悬臂梁相比，在94％块状硅层上包含6％多孔硅（孔隙度为50％）的双层悬臂梁的第一本征频率从（5447± 120）Hz至≈5198 Hz。这种降低还伴随着品质因数降低了两个。

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