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首页> 外文期刊>Journal of Electrical Engineering >Microelectrode array systems for their use in single nanowire-based gas sensor platforms
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Microelectrode array systems for their use in single nanowire-based gas sensor platforms

机译：用于基于单个纳米线的气体传感器平台中的微电极阵列系统

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Microelectrode array systems for their use in single-nanowire-based gas sensor platforms are developed. The topology of the system is designed with the aim of determining the optimal conditions and the factors involved in the selective integration of gas sensitive semiconducting metal oxide nanowires via dielectrophoresis method. Thus various electrode geometries with electrode gaps between 2 and 10 μm and electrode tip-end shapes are investigated employing tungsten oxide nanowires synthetized via aerosol-assisted chemical vapor deposition. Results obtained from SEM, optical microscopy and electrical tests demonstrate that the integration and electrical contact of single nanowires across the electrodes is achieved in the systems with electrode gaps below 3 μm. These results are discussed and further improvements in the design of these systems are suggested.
机译：开发了用于单纳米线气体传感器平台的微电极阵列系统。设计该系统的拓扑结构是为了确定最佳条件和介电电泳法选择性集成气敏半导体金属氧化物纳米线所涉及的因素。因此，采用通过气溶胶辅助化学气相沉积法合成的氧化钨纳米线，研究了电极间隙在2到10μm之间以及电极尖端形状的各种电极几何形状。从SEM，光学显微镜和电学测试获得的结果表明，单纳米线跨电极的集成和电接触是在电极间隙小于3μm的系统中实现的。讨论了这些结果，并提出了对这些系统设计的进一步改进。

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