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首页> 外文期刊>Journal of Laser Micro/Nanoengineering >Monitoring of the Femtosecond Laser Micromachining Process of Materials Immersed in Water by Use of Laser-Induced Breakdown Spectroscopy
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Monitoring of the Femtosecond Laser Micromachining Process of Materials Immersed in Water by Use of Laser-Induced Breakdown Spectroscopy

机译:飞秒激光微加工过程中浸入水中的材料的激光诱导击穿光谱法的监测

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摘要

Laser micromachining related with ablation can benefit from laser-induced breakdown spectros-copy (LIBS), as this not only allows for determining the chemical composition, but can also lead to an insight into the instant characteristics or quality of the micromachining. In this report, we present results on the application of LIBS in monitoring the micromachining of soda-lime glass immersed in water with femtosecond high repetition rate pulses.
机译:与消融有关的激光微加工可受益于激光诱导击穿光谱(LIBS),因为这不仅可以确定化学成分,而且还可以洞察微加工的即时特性或质量。在本报告中,我们介绍了LIBS在使用飞秒高重复频率脉冲监测浸入水中的钠钙玻璃微加工中的应用结果。

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