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首页> 外文期刊>Journal of Photopolymer Science and Technology >Solubility Property of Condensable Gases of Trans-1-Chloro-3,3,3-Trifluoropropene and Trans-1,3,3,3-Tetrafluoropropene in UV Nanoimprint
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Solubility Property of Condensable Gases of Trans-1-Chloro-3,3,3-Trifluoropropene and Trans-1,3,3,3-Tetrafluoropropene in UV Nanoimprint

机译：反式-1-氯-3-3,3,3-三氟丙烯和反式1,3,3,3-四氟丙烯在紫外线纳米压印中的可溶性

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摘要

Bubble-free filling is required to realize high-throughput mass production in ultraviolet nanoimprint lithography (UV-NIL). UV-NIL in 1-chloro-3,3,3-trifluoropropene (CTFP) and trans-1,3,3,3-tetrafluoro-propene (TFP) gases has enabled bubble-free UV nanoimprinting of spin-coated films without a vacuum. We evaluate the amount of gas dissolution of 24 organic solvents, which was measured using an electronic balance in a glove box with saturated gases of CTFP and TFP, and use the Hansen solubility parameters (HSP) for analysis. Although the HSP teas graph indicated the same solubility trend in TFP and CTFP atmospheres, the amount of TFP gas dissolution was 1/5th that of CTFP. The pattern quality of acrylate UV-curable resins, which absorb well the condensable gases, was also demonstrated by altering the fraction of the introduced condensable gas mixture of TFP/CTFP. Fine line patterns with a width of 16 nm were obtained by UV-NIL with a high TFP fraction (>66%) in the TFP/CTFP mixed gas atmosphere.
机译：需要无气泡填充才能实现紫外线纳米压印光刻（UV-NIL）的高通量批量生产。 1-氯-3,3,3-三氟丙烯（CTFP）和反式1,3,3,3-四氟丙烯（TFP）气体中的UV-NIL使得旋涂膜无气泡的UV纳米压印成为可能真空。我们评估了24种有机溶剂的气体溶解量，这是在装有CTFP和TFP饱和气体的手套箱中使用电子天平测量的，并使用Hansen溶解度参数（HSP）进行分析。尽管HSP茶图在TFP和CTFP气氛中显示出相同的溶解度趋势，但TFP气体溶解量是CTFP的1/5。通过改变引入的TFP / CTFP的可冷凝气体混合物的比例，也可以很好地吸收可冷凝气体的丙烯酸酯UV固化树脂的图案质量。通过UV-NIL在TFP / CTFP混合气体气氛中以高TFP分数（> 66％）获得了宽度为16 nm的细线图案。

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