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Nanocomposite glass abrasives

机译：纳米复合玻璃磨料

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Cerium oxide is a suitable material for glass polishing because it has both a high chemical reactivity and a suitable hardness for glass polishing. We focused on nano-dispersion abrasives containing two materials that specialize in a chemical reactivity with glass and a suitable mechanical strength and they were synthesized by spray pyrolysis. We first review on CeO2–ZrO2–Y2O3 nano-composite abrasives that can show you the effect of nano-composition on glass polishing. These nano-composites showed slightly lower removal rate than commercial CeO2-based abrasive, but the composite led to smooth surface of glass. The nano-dispersed SrZrO3/ZrO2 composite particles were then synthesized by spray pyrolysis. The glass polishing using SrZrO3/ZrO2 nanocomposite abrasives led to relatively high removal rate and quite smooth surface of glass. The SrZrO3/CeO2 abrasives showed superior polishing properties to conventional ceria-based abrasives by adjusting SrZrO3/CeO2 ratios. These results revealed that the nano-composition enables us to control mechanical and chemical ratios and this CMP control would lead to develop leading-edge abrasives.
机译：氧化铈是适用于玻璃抛光的材料，因为它具有高化学反应性和适用于玻璃抛光的硬度。我们专注于包含两种材料的纳米分散磨料，这些材料专门用于与玻璃化学反应并具有合适的机械强度，并且它们是通过喷雾热解合成的。我们首先回顾一下CeO 2 –ZrO 2 –Y 2 O 3 纳米复合磨料，它可以向您展示纳米组成对玻璃抛光的影响。这些纳米复合材料的去除率略低于商业上基于CeO 2 的磨料，但复合材料导致玻璃表面光滑。然后通过喷雾热解合成了纳米分散的SrZrO 3 / ZrO 2 复合颗粒。使用SrZrO 3 / ZrO 2 纳米复合磨料对玻璃进行抛光，可以实现较高的去除率和相当光滑的玻璃表面。通过调节SrZrO 3 / CeO 2 ，SrZrO 3 / CeO 2 磨料显示出优于常规二氧化铈基磨料的抛光性能。 sub>比率。这些结果表明，纳米成分使我们能够控制机械和化学比，而这种CMP控制将导致开发最先进的磨料。

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