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Fabrication of arrayed triangular micro-cavities for SERS substrates using the force modulated indention process

机译：使用力调制压痕工艺制造用于SERS基板的阵列三角形微腔

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Based on the tip-based continuous indentation process, a novel method for the fabrication of periodic arrayed triangular micro-cavities on copper (Cu) surfaces is presented. The indentation force is modulated and the indentation speed and moving velocity of the precision stage used to drive the workpiece are optimized to improve the machining efficiency. The deformation property of the pile-ups at the side of the pyramidal cavity is studied. Due to the overlap of the pile-ups of adjacent micro pyramidal cavities, two and three dimensional arrayed nanostructures are successfully achieved. Then, the structured Cu (110) surface is used as a surface-enhanced Raman scattering (SERS) substrate with the rhodamine 6G (R6G) probe molecule as the detecting target in the present study. Experimental results show that the Raman intensity is enhanced with a decrease in the moving velocity of the precision stage. SERS enhancement factors within the range of 105 to 3 × 106 are achieved on the structured Cu (110) surface, which demonstrates that this method is reliable, replicable, homogeneous and inexpensive for the fabrication of SERS substrates.
机译：基于基于尖端的连续压痕过程，提出了一种在铜（Cu）表面上制造周期性排列的三角形微腔的新方法。调整压入力，并优化用于驱动工件的精密平台的压入速度和移动速度，以提高加工效率。研究了锥体腔侧面堆积物的变形特性。由于相邻的微型锥体腔的堆积的重叠，成功地实现了二维和三维排列的纳米结构。然后，结构化的Cu（110）表面用作表面增强拉曼散射（SERS）衬底，以罗丹明6G（R6G）探针分子作为本研究的检测目标。实验结果表明，拉曼强度随着精密平台移动速度的降低而增强。在结构化的Cu（110 ）表面，这表明该方法对于SERS基板的制造是可靠，可复制，均一且廉价的。

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