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Selective and confined growth of transition metal dichalcogenides on transferred graphene

机译:过渡金属二卤化物在转移石墨烯上的选择性和局限性生长

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We demonstrate confinement of CVD grown MoS2 to a patterned graphene area, forming a vertically stacked 2D heterostructure. The CVD-grown graphene had been transferred onto a Si wafer and patterned using photolithography. Raman mapping and spectral analysis reveal few-layer MoS2 grew selectively on graphene regions, and not on the surrounding SiO2 substrate surface. We also report CVD growth of WS2 directly on transferred graphene. Unlike MoS2, no few-layer regions were found; the WS2 was found to be either monolayer or at least five layers (bulk). The WS2 coverage was only partial, but selectivity to graphene is apparent. These findings have the potential to significantly advance fabrication of vertical 2D heterostructures and related devices, and suggest the selective growth on graphene may be applicable to TMDCs in general.
机译:我们演示了将CVD生长的MoS 2 限制在图案化的石墨烯区域,形成垂直堆叠的二维异质结构。 CVD生长的石墨烯已转移到Si晶片上,并使用光刻进行了图案化。拉曼作图和光谱分析表明,在石墨烯区域而不是在周围的SiO 2 上选择性生长的少数MoS 2 层小>基材表面。我们还报告了直接在转移的石墨烯上WS 2 的CVD生长。与MoS 2 不同,没有发现几层区域。发现WS 2 是单层的或至少五层(批量)。 WS 2 的覆盖范围只是部分,但对石墨烯的选择性显而易见。这些发现具有显着提高垂直2D异质结构和相关器件的制造潜力,并表明在石墨烯上的选择性生长通常可适用于TMDC。

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