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Self-organization of porous anodic alumina films studied in situ by grazing-incidence transmission small-angle X-ray scattering

机译:掠入射透射小角X射线散射原位研究多孔阳极氧化铝膜的自组织

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Self-ordered porous anodic alumina (PAA) films are studied extensively due to a large number of possible applications in nanotechnology and low cost of production. Whereas empirical relationships between growth conditions and produced oxides have been established, fundamental aspects regarding pore formation and self-organization are still under debate. We present in situ structural studies of PAA films using grazing-incidence transmission small-angle X-ray scattering. We have considered the two most used recipes where the pores self-organize: 0.3 M H _(2) SO _(4) at 25 V and 0.3 M C _(2) H _(2) O _(4) at 40 V. During anodization we have followed the evolution of the structural parameters: average interpore distance, length of ordered pores domains, and thickness of the porous oxide layer. Compared to the extensively used ex situ investigations, our approach gives an unprecedented temporal accuracy in determination of the parameters. By using of Al(100), Al(110) and Al(111) surfaces, the influence of surface orientation on the structural evolution was studied, and no significant differences in the interpore distance and domain length could be observed. However, the rate of oxide growth in 0.3 M C _(2) H _(2) O _(4) at 40 V was significantly influenced by the surface orientation, where the slowest growth occurs for Al(111). In 0.3 M H _(2) SO _(4) at 25 V, the growth rates were higher, but the influence of surface orientation was not obvious. The structural evolution was also studied on pre-patterned aluminum surfaces. These studies show that although the initial structures of the oxides are governed by pre-patterning geometry, the final structures are dictated by the anodization conditions.
机译:自定序的多孔阳极氧化铝(PAA)膜由于在纳米技术中的大量可能应用和较低的生产成本而得到了广泛的研究。尽管已经建立了生长条件和产生的氧化物之间的经验关系,但是关于孔形成和自组织的基本方面仍在争论中。我们目前使用掠入射透射小角X射线散射对PAA膜进行原位结构研究。我们考虑了两种最常用的毛孔自组织配方:25 V时0.3 MH _(2)SO _(4)和40 V时0.3 MC _(2)H _(2)O _(4)。在阳极氧化过程中,我们遵循了结构参数的演变:平均孔距,有序孔域的长度以及多孔氧化物层的厚度。与广泛使用的异地调查相比,我们的方法在确定参数方面提供了前所未有的时间准确性。通过使用Al(100),Al(110)和Al(111)表面,研究了表面取向对结构演变的影响,并且未观察到孔间距和畴长的显着差异。但是,在40 V下0.3 M C _(2)H _(2)O _(4)中氧化物的生长速率受表面取向的影响很大,其中Al(111)的生长最慢。在25 V下0.3 M H _(2)SO _(4)中,生长速率较高,但表面取向的影响并不明显。还研究了在预图案化铝表面上的结构演变。这些研究表明,尽管氧化物的初始结构受预构图几何形状支配,但最终结构仍由阳极氧化条件决定。

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