We report the fabrication of a solidly mounted resonator (SMR) that can also function as a sensor for biological molecules. The SMR, consisting of a Au electrode, aluminum nitride (AlN) piezoelectric thin film and Bragg acoustic reflector, was fabricated on a Si substrate by radio frequency (RF) magnetron sputtering. The Bragg acoustic reflector, made entirely of metal, has small internal stress and good heat conduction. Human immunoglobulin G (IgG) antibody was immobilized on the modified (by self-assembled monolayer method) Au electrode surface of the SMR and goat anti-human IgG antigen was captured through the specificity of bond between the antibody and antigen on the electrode surface. We found a linear relationship between the resonant frequency shift and the concentration of goat anti-human IgG antigen for concentrations smaller than 0.4 mg ml ~(?1) and a relatively constant frequency shift for concentrations greater than 0.5 mg ml ~(?1) . A series of interference experiments can prove that the selectivity of the sensor is satisfactory. Our findings suggest that the SMR sensor is an attractive alternative for biomolecule detection.
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