A new class of tri-axial miniature magnetometer consisting of a planar fluxgate structure with an orthogonal ferromagnetic fluxguide centrally situated over the magnetic cores is presented. The magnetic sensor possesses a cruciform ferromagnetic core placed diagonally upon the square excitation coil under which two pairs of pick-up coils for in-plane field detection are allocated. Effective principles and analysis of the magnetometer for 3-D field vectors are described and verified by numerically electromagnetic simulation for the excitation and magnetization of the ferromagnetic cores. The sensor is operated by applying the second-harmonic detection technique that can verify V-B relationship and device responsivity. Experimental characterization of the miniature fluxgate device demonstrates satisfactory spatial magnetic field detection results in terms of responsivity and noise spectrum. As a result, at an excitation frequency of 50 kHz, a maximum in-plane responsivity of 122.4 V/T appears and a maximum out-of-plane responsivity of 11.6 V/T is obtained as well. The minimum field noise spectra are found to be 0.11 nT/√Hz and 6.29 nT/√Hz, respectively, in X- and Z-axis at 1 Hz under the same excitation frequency. Compared with the previous tri-axis fluxgate devices, this planar magnetic sensor with an orthogonal fluxguide provides beneficial enhancement in both sensory functionality and manufacturing simplicity. More importantly, this novel device concept is considered highly suitable for the extension to a silicon sensor made by the current CMOS-MEMS technologies, thus emphasizing its emerging applications of field detection in portable industrial electronics.
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机译：提出了一种新型的三轴微型磁力计，它由平面磁通门结构和正交位于铁心上方的正交铁磁通量导向器组成。磁传感器具有一个十字形铁磁芯，对角放置在方形励磁线圈上，在该线圈下分配了两对用于面内磁场检测的拾波线圈。描述并通过数字电磁仿真对铁磁芯的励磁和磁化进行了3D场矢量磁力计的有效原理和分析。通过应用二次谐波检测技术来操作传感器，该技术可以验证V-B关系和设备响应度。微型磁通门设备的实验特性证明了在响应度和噪声谱方面令人满意的空间磁场检测结果。结果，在50kHz的激励频率下，出现了最大平面内响应度为122.4V / T，并且还获得了最大平面外响应度为11.6V / T。在相同的激励频率下，在1 Hz的X和Z轴上，最小场噪声谱分别为0.11 nT /√Hz和6.29 nT /√Hz。与以前的三轴磁通门设备相比，这种具有正交磁通量向导的平面磁传感器在传感功能和制造简便性方面均提供了有益的增强。更重要的是，这种新颖的设备概念被认为非常适合于扩展由当前CMOS-MEMS技术制成的硅传感器，从而强调了其在便携式工业电子领域中新兴的现场检测应用。
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