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首页> 外文期刊>Bulletin of the American Physical Society >APS -APS March Meeting 2017 - Event - Image Reconstruction for Low Dose Scanning Electron Microscopy.
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APS -APS March Meeting 2017 - Event - Image Reconstruction for Low Dose Scanning Electron Microscopy.

机译：APS -APS 2017年3月会议-事件-低剂量扫描电子显微镜的图像重建。

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Scanning electron microscopy is one of the most popular characterization techniques in material science, natural sciences, and nanotechnology when high resolution surface characterization is required. However, due to complex noise profiles associated both with the electron signal production, as well as the signal processing units the signal-to-noise ratio for data collection can be quite low. The typical way to address this issue is to increase the dwell time that the electron beam spends at each point during the acquisition process, and thus average out the random fluctuations in the signal. However, this is not possible for many organic samples and some inorganic ones such as zeolites which are highly susceptible to the thermal damage associated with long exposures to the imaging electron beam. In this work we describe methodologies based on block-matching to reconstruct accurate results from noisy images acquired at low doses/fast speeds. To this end we develop a model for the typical noise profiles encountered in electron microscopy. The strategies proposed are transferable to other imaging methods used in material science, such as composition mapping.
机译：当需要高分辨率的表面表征时，扫描电子显微镜是材料科学，自然科学和纳米技术中最流行的表征技术之一。然而，由于与电子信号产生以及信号处理单元相关的复杂噪声分布，用于数据收集的信噪比可能非常低。解决此问题的典型方法是增加在捕获过程中电子束在每个点所花费的停留时间，从而使信号中的随机波动平均化。但是，这对于许多有机样品和某些无机样品（例如沸石）是不可能的，这些样品高度易受与长时间暴露于成像电子束相关的热损伤的影响。在这项工作中，我们描述了基于块匹配的方法，以从低剂量/快速采集的嘈杂图像中重建准确结果。为此，我们为电子显微镜中遇到的典型噪声曲线开发了一个模型。提出的策略可以转移到材料科学中使用的其他成像方法，例如成分映射。

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