首页> 外文期刊>Bulletin of the American Physical Society >APS -2017 Annual Fall Meeting of the APS Ohio-Region Section - Event - Hall Effect Studies of LPCVD grown $eta $-Ga$_{mathrm{2}}$O$_{mathrm{3}}$ on Sapphire
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APS -2017 Annual Fall Meeting of the APS Ohio-Region Section - Event - Hall Effect Studies of LPCVD grown $eta $-Ga$_{mathrm{2}}$O$_{mathrm{3}}$ on Sapphire

机译:APS -2017 APS俄亥俄州区域的年度秋季会议 - 赛事 - LPCVD Growlow $ eta $-$ _ {mathrm {2}} $ o $ _ {mathrm {3}} $ on sapphire

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With its ultra-wide bandgap of 4.5-4.9 eV and large breakdown electronic field, $eta $ - Ga$_{mathrm{2}}$O$_{mathrm{3}}$ has recently attracted attention because of its potential for next generation power electronics applications. The estimated breakdown field for $eta $ -Ga$_{mathrm{2}}$O$_{mathrm{3}}$ is 8 MV/cm, much larger than 2.5 MV/cm for 4H-SiC and 3.3 MV/cm for GaN, which could enable power electronics with larger power density and greater efficiency [1]. Also, Ga$_{mathrm{2}}$O$_{mathrm{3}}$ has the potential to be more cost-efficient in mass production than other wide bandgap materials due to its ability to be synthesized through standard melt growth methods [2]. With this motivation, this study examines the electronic properties of $eta $ - Ga$_{mathrm{2}}$O$_{mathrm{3}}$ via temperature dependent Hall effect measurements. Among several samples, the highest measured mobility was 34 cm2/Vs at room temperature and 40 cm2/Vs at 150K. These results indicate the potential of LPCVD grown Si-doped Ga$_{mathrm{2}}$O$_{mathrm{3}}$ for next generation semiconductor power electronics applications. [1] Applied Physics Letters 100, 013504 (2012) [2] Applied Physics Letters 103, 123511 (2013).
机译:凭借其超宽带隙4.5-4.9 EV和大型击穿电子领域,$ ETA $ - GA $ _ {MATHRM {2}} $ O $ _ {MATHRM {MATHRM {3}} $最近因其潜力而受到关注下一代电力电子应用。 $ eta $ -ga $ _ {mathrm {2}} $ o $ _ {mathrm {3}} $的估计分解字段为8 mv / cm,对于4h-sic和3.3 mV / 3.3 mV / CM for GaN,它可以使功率密度较大的电力电子设备和更高的效率[1]。此外,GA $ _ {MATHRM {2}} $ O $ _ {MATHRM {3}} $在批量生产上具有比其他宽带隙材料更具成本效益,因为它是通过标准熔体生长合成的能力方法[2]。通过这种动机,本研究审查了$ eta $ - ga $ _ {mathrm {2}} $ o $ _ {mathrm {3}} $通过温度依赖霍尔效应测量的电子特性。在几个样品中,在室温下最高测量的迁移率为34cm 2 / vs,在150k处为40cm 2 / vs。这些结果表明LPCVD生长的Si-掺杂GA $ _ {mathrm {2}} $ o $ _ {mathrm {3}} $的潜力为下一代半导体电源电子应用。 [1]应用物理信件100,013504(2012)[2]应用物理字母103,123511(2013)。

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