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首页> 外文期刊>RSC Advances >Structural and morphological tuning of iron oxide polymorphs by ECR plasma-assisted thermal oxidation
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Structural and morphological tuning of iron oxide polymorphs by ECR plasma-assisted thermal oxidation

机译：ECR等离子体辅助热氧化氧化铁多晶型物的结构和形态学调整

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The work presented involves the generation of oxygen plasma species at low pressure utilizing an Electron Cyclotron Resonance (ECR) plasma reactor, and their interactions with micron- and nano-sized iron films (M-Fe and N-Fe film respectively) prepared using ethyl cellulose processed at high temperature. A specially designed radiation heater (RH) was used to raise the surface temperature of the film rapidly, exactly at the film interface, where the plasma species interact with the surface. As a result of the interaction of oxygen plasma species and temperature, iron is oxidized to different polymorphs depending on the operating pressure and hence oxygen gas flow rate. The phase, as well as the morphology of the film was controlled by monitoring the oxygen flow rate using the unique Plasma-Assisted Thermal Oxidation (PATO) process. Different polymorphs, viz. , Fe _(3) O _(4) , γ-Fe _(2) O _(3) , α-Fe _(2) O _(3) and different morphologies, such as polygonal, compact facets, wire-like (1D) nanostructures at the surface were obtained for the films processed using PATO. The selected PATO-processed films were investigated for Field Electron Emission (FEE) properties. The 1D-grown surface of iron oxide obtained from the M-Fe film showed a turn-on field of 3 MV m ~(?1) and emission current of 337 μA cm ~(?2) , whereas the pyramidal surface morphology obtained using N-Fe film gives a turn-on field of 3.3 MV m ~(?1) with an emission current of 578 μA cm ~(?2) .
机译：所提出的工作涉及利用电子回旋共振（ECR）等离子体反应器的低压在低压下产生氧等离子体物种，以及它们与使用乙基制备的微米和纳米尺寸的铁膜（M-Fe和N-Fe膜）的相互作用在高温下加工纤维素。使用专门设计的辐射加热器（RH）迅速地提高膜的表面温度，精确地在薄膜界面处，等离子体物种与表面相互作用。由于氧等离子体物质和温度相互作用，根据操作压力，铁被氧化成不同的多晶型物，因此氧气流速。通过使用独特的等离子体辅助热氧化（Pato）工艺来监测氧气流速来控制膜的相以及形态。不同的多晶型物，viz。 ，Fe _（3）O _（4），γ-FE _（2）O _（3），α-FE _（2）O _（3）和不同的形态，如多边形，紧凑型，线 - 将表面上的（1D）纳米结构用于使用PATO处理的薄膜。研究了所选择的帕托处理的薄膜，用于现场电子发射（费用）性质。从M-Fe膜获得的氧化铁的1D生长表面显示出3mV m〜（α1）的开启场和337μAcm〜（Δ2）的发射电流，而使用金字塔表面形态N-Fe膜的开启领域为3.3mV m〜（α1），发射电流为578μAcm〜（Δ2）。

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