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Heterogeneous semiconductor nanowire array for sensitive broadband photodetector by crack photolithography-based micro-/nanofluidic platforms

机译:用于敏感宽带光电探测器的异构半导体纳米线阵列通过裂缝光刻基微/纳米流体平台

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The in situ growth of nanowires (NWs) into nano-/microelectromechanical systems (NEMS/MEMS) by solution processing is attractive for its relative simplicity and economic value. We present innovative, versatile microfabrication that produces multiple, heterogeneous semiconductor NWs. A crack photolithography-based micro-/nanofluidic platform has been developed. This platform offers the in situ solution growth of NWs while enabling the control of quantity, dimensions, orientation, alignment, position, and material. The generation of grain boundary (GB)-rich CH _(3) NH _(3) PbI _(3) NWs using the micro-/nanofluidic device is exemplary. High-quality single-crystal CH _(3) NH _(3) PbI _(3) NWs were derived by injection of a CH _(3) NH _(3) PbI _(3) solution. We produced a parallel NW array of CH _(3) NH _(3) PbI _(3) NW for visible light detection and ZnO NW for ultraviolet detection, thereby demonstrating an unprecedented broadband composite photodetector. The micro-/nanofluidic fabrication platform enables the production of multiple, heterogeneous semiconductor NW arrays on one substrate, offering the potential to elicit synergistic performance and functional enhancements from various NWs.
机译:通过溶液处理将纳米线(NWS)的原位生长(NEM)进入纳米/微机电系统(NEMS / MEMS)对于其相对简单和经济价值具有吸引力。我们提出了创新的通用微生物,可产生多个异构的半导体NWS。已经开发了一种裂缝的基于光刻的微/纳米流体平台。该平台提供NWS的原位解决方案增长,同时能够控制数量,尺寸,方向,对准,位置和材料。使用微/纳米流体装置的晶界(GB)-RICH CH _(3)PBI _(3)NWS的产生是示例性的。通过注射CH _(3)NH _(3)PBI _(3)溶液,得到高质量的单晶CH _(3)NH _(3)PBI _(3)NWS。我们制造了一个平行的NW阵列的CH _(3)NH _(3)PBI _(3)NW,用于可见光检测和用于紫外检测的ZnO NW,从而演示了前所未有的宽带复合光电探测器。微/纳米流体制造平台使得能够在一个基板上产生多个异构的半导体NW阵列,提供从各种NWS引出协同性能和功能增强的潜力。

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