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首页> 外文期刊>RSC Advances >Influence of CrB2 target current on the microstructure, mechanical and tribological properties of Cr–B–C–N coatings in water
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Influence of CrB2 target current on the microstructure, mechanical and tribological properties of Cr–B–C–N coatings in water

机译：CRB2靶电流对水中Cr-B-C-N涂层微观结构，机械和摩擦学性能的影响

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摘要

Cr–B–C–N coatings with different boron contents (24.6–27.2 at%) were deposited on Si(100) wafers and 316L stainless steels by using closed-field unbalanced magnetron sputtering via adjusting the CrB _(2) target current. The microstructures, mechanical and tribological properties of Cr–B–C–N coatings in water were characterized by using XRD, XPS, SEM, nano-indentation and ball-on-disk tribometers. The results showed that the soft amorphous BN phases were formed when boron elements were introduced into CrCN coatings. With an increase in the CrB _(2) target current, the B content increased from 24.9 to 27.2 at%, which caused the a-BN content in CrBCN coatings to increase gradually, and then the hardness of CrBCN coatings decreased from 18.6 ± 0.86 GPa to 16.3 ± 0.28 GPa. Due to the formation of H _(3) BO _(3) , the friction coefficient and wear rates of CrBCN/SiC tribopairs were lower than those of CrCN/SiC tribopairs. When the CrBCN coatings (25.1 at% B) were deposited at the CrB _(2) target current of 3 A, the lowest values of friction coefficient (0.16) and wear rate (2.1 × 10 ~(?7) mm ~(3) N ~(?1) m ~(?1) ) were obtained simultaneously.
机译：通过调节CRB _（2）靶电流，通过调节CRB _（2）靶电流，在Si（100）晶片和316L不锈钢上沉积不同硼含量的Cr-B-C-N涂层（24.6-27.2）涂层。通过使用XRD，XPS，SEM，纳米压痕和圆盘摩擦仪来表征CR-B-C-N涂层的微观结构，机械和摩擦学特性。结果表明，当将硼元素引入CRCN涂层时，形成软无定形BN相。随着CRB _（2）靶电流的增加，B含量从24.9％增加到27.2％，这导致CRBCN涂层中的A-BN含量逐渐增加，然后CRBCN涂层的硬度从18.6±0.86降低GPA至16.3±0.28 GPA。由于H _（3）BO _（3）的形成，CRBCN / SIC TRABIOPIES的摩擦系数和磨损率低于CRCN / SIC TRABIOMIES的摩擦系数和磨损率。当在CRB _（2）靶电流为3a的CRB涂层（25.1处）时，摩擦系数（0.16）和磨损率的最低值（2.1×10〜（？7）mm〜（3同时获得N〜（α1）m〜（α1））。

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