• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>RSC Advances >Pyrolyzed carbon with embedded NiO/Ni nanospheres for applications in microelectrodes
【24h】

Pyrolyzed carbon with embedded NiO/Ni nanospheres for applications in microelectrodes

机译：具有嵌入式NiO / Ni纳米球的热解碳，用于微电极的应用

获取原文
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Photoresist, a frequently used material in existing microfabrication processes, can be utilized in carbon micro electro mechanical system (C-MEMS) since the patterned carbon micro/nano structures can be formed by pyrolysis of a patterned photoresist. These pyrolyzed carbon microstructures have been used as functional and structural units in carbon-MEMS. Compositing and integration with high performance nanostructures is one important strategy for carbon microstructures with applications in microdevices. Herein, we report a patterned microelectrode of pyrolyzed carbon with embedded NiO/Ni nanospheres (carbon/NiO/Ni) fabricated by a novel microfabrication process combing optimized photolithography with pyrolysis. The microsupercapacitors with interdigital carbon/NiO/Ni (C/NiO/Ni) microelectrodes show a high capacitance of 2.75 mF cm ~(?2) . In this microsupercapacitor, the C/NiO/Ni is utilized as the active electrode material and current collector, which makes the microfabrication facile and compatible with micromachining technologies. In addition, the C/NiO/Ni microelectrode pyrolyzed at 900 °C shows a higher capacitance than that of pyrolyzed carbon microelectrodes. The optimized microfabrication process with effectiveness and repeatability shows great potential for fine micropatterning of carbon and electrochemically active materials on a large scale, especially for the microstructuring of a carbon-based composite.
机译：光致抗蚀剂，现有微型制备方法中的常用材料可以用于碳微电机械系统（C-MEMS），因为图案化的碳微/纳米结构可以通过图案化的光致抗蚀剂的热解形成。这些热解碳微结构已被用作碳 - MEM中的功能性和结构单元。与高性能纳米结构的合成和集成是微结构中应用的碳微观结构的一个重要策略。在此，我们报告了一种具有通过新微型微制酶法制备的嵌入式NiO / Ni纳米球（碳/ NIO / Ni）的嵌入式的NiO / Ni纳米粉末（碳/ NiO / Ni），用热解梳理优化的光刻。具有叉指碳/ NIO / NI（C / NIO / NI）微电极的微型电路仪显示出2.75mF cm〜（α2）的高电容。在该微型电路机中，C / NIO / Ni用作有源电极材料和集电器，使得微型加工容易和与微机械技术相容。另外，在900℃下热解的C / NIO / Ni微电极显示出比热解的碳微电极更高的电容。具有有效性和重复性的优化的微制造过程显示出碳和电化学活性材料的精细微型仪的巨大潜力，特别是对于碳基复合材料的微观结构。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号