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首页> 外文期刊>RSC Advances >One-step facile fabrication of controllable microcone and micromolar silicon arrays with tunable wettability by liquid-assisted femtosecond laser irradiation
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One-step facile fabrication of controllable microcone and micromolar silicon arrays with tunable wettability by liquid-assisted femtosecond laser irradiation

机译：通过液体辅助飞秒激光照射可调谐润湿性的可控微酮和微摩尔硅阵列的一步方面制造

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摘要

Micro/nanostructured silicon surfaces are attracting more and more research attention because of the wide range of applications in optoelectronic devices, microelectronics, microfluidics, and biomedical devices. Despite numerous efforts for fabricating a variety of micro/nanostructures, a one-step, facile and effective method for preparing diverse, three-dimensional micro/nanostructures is still desired. In this paper, a new approach based on liquid (ethanol and sucrose solution) assisted femtosecond laser irradiation on silicon substrates was proposed for the preparation of controllable microcones and micromolars arrays. Their height can be controlled from 3.3 to 17.6 μm for microcones and 5.9～33.7 μm for micromolars by adjusting the pulse energy. The processed surfaces are superhydrophilic (25.05～2.46°), superoleophilic (7.22～0°), and underwater superoleophobic (124.9～169.2°). The surfaces further demonstrate many distinct functions such as fog collecting and volatilizing, droplet storage and transportation, and liquid directional transfer. Our proposed method features rapidness, simplicity and easiness of large-area fabrication, which may find enormous potential applications in many fields such as microfluidic devices, fluid microreactors, biomedicine, and chemical–biological sensors.
机译：微/纳米结构硅表面由于光电器件，微电子，微流体和生物医学装置的广泛应用而受到越来越多的研究。尽管有许多努力制造各种微/纳米结构，但仍然需要一步，容易和有效的制备三维微/纳米结构的方法。本文提出了一种基于液体（乙醇和蔗糖溶液）的新方法辅助硅基衬底上的飞秒激光照射，用于制备可控的微孔和微摩尔阵列。通过调节脉冲能量，它们的高度可以为微透明的微观和5.9〜33.7μm控制的3.3至17.6μm。加工表面是超硫酸（25.05〜2.46°），超级电泳（7.22〜0°）和水下超级（124.9〜169.2°）。该表面进一步证明了许多不同的功能，例如雾收集和挥发，液滴存储和运输，以及液体定向转移。我们所提出的方法具有大面积制造的速度，简单性和容易性，这可能在许多领域中找到巨大的潜在应用，例如微流体装置，流体微反应器，生物医学和化学生物传感器。

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