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Wavelength-Selective Coatings on Glass with High Hardness and Damage Resistance

机译:具有高硬度和损伤性的玻璃上的波长选择性涂层

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摘要

Wavelength-selective coatings are broadly applied across diverse industries such as solar energy management, infrared sensing, telecommunications, laser optics, and eye-protective lenses. These coatings have historically not been optimized for hardness or mechanical durability and typically suffer from higher susceptibility to scratch and damage events than uncoated glass. In this work, we describe a family of wavelength-selective coatings with hardness and scratch resistance that are significantly higher than the chemically strengthened glass substrates on which the coatings are fabricated. The coatings are made using industrially scalable reactive sputtering methods. Wavelength-selective coatings are fabricated with nanoindentation hardness as high as 16–20 GPa over indentation depths ranging from 200 to 800 nm, as well as excellent durability in aggressive scratch testing. Tunable visible to near-infrared wavelength selectivity ratios (reflectance of stopband: reflectance of passband) as high as 7:1 are achieved. The feasibility of narrowband hard coating design is also demonstrated, with visible narrowband transmission having a peak FWHM of ~8 nm (~1.6%). A unique “buried layers” hard coating design strategy is shown to deliver particularly excellent hardness profiles. These designs can be tailored for a variety of different wavelengths and selectivity ratios, enabling new uses of wavelength-selective optics in mechanically demanding applications.
机译:波长选择性涂层广泛地应用于太阳能管理,红外传感,电信,激光光学和眼睛保护镜片等各种产业。这些涂层历史上没有针对硬度或机械耐久性进行优化,并且通常对比未涂覆的玻璃划伤和损坏事件的易感性较高。在这项工作中,我们描述了一种具有硬度和耐刮擦性的波长选择性涂层,其显着高于化学加强的玻璃基板,在其上制造涂层。涂层采用工业上可伸缩的反应溅射方法制造。波长选择性涂层以纳米狭窄硬度高达16-20GPa的压痕深度,从200至800nm的压痕深度,以及侵蚀性划痕测试中的优异耐用性。可调谐可见于近红外波长选择性比(阻带的反射率:通带的反射率)实现高达7:1。还证明了窄带硬涂层设计的可行性,可见窄带变速箱,峰值FWHM为〜8nm(〜1.6%)。示出了独特的“掩埋层”硬涂层设计策略,以提供特别优异的硬度曲线。这些设计可以针对各种不同的波长和选择性比量身定制,从而实现机械要求苛刻的应用中的波长选择光学器件的新用途。

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