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Investigation of the Influence of Microdroplets on the Coatings Nanolayer Structure

机译:微型轧体对纳米结构涂层的影响研究

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摘要

The paper presents the results of studies focused on the specific features typical for the formation of the shape and structure of microdroplets embedded into the structure of the Ti–TiN–(Ti,Cr,Mo,Al)N and Ti–TiN–(Ti,Al,Nb,Zr)N coatings during their deposition. Three main microdroplet shapes—a sphere, a tear, and a lens—have been considered. The specific features typical for the formation of secondary layered structures on the surface of some microdroplets have also been examined. As a result of the conducted investigations, with the use of scanning and transmission electron microscopy, the influence of microdroplets on the distortion of the nanolayer structure of the coatings was studied. A hypothesis has been proposed concerning a relationship between the microdroplet shape and the presence or absence of secondary structures and the microdroplet sizes and weight, as well as the conditions in the unit chamber during the movement of a microdroplet from a cathode to the deposition surface. Based on the study focused on the shape of the microdroplet core and the specific features typical for the formation of the secondary structure around it, a hypothesis has been proposed, according to which, for some microdroplets, it takes much more time than previously assumed for the movement from a cathode to the deposition surface.
机译:本文提出的研究的结果集中在特定的特征为典型的形状和嵌入的Ti-锡(钛,铬,钼,铝)N和Ti-锡的结构微滴的结构的形成(钛,Al,Nb,Zr)N沉积期间涂层。已经考虑了三个主要的Microdroplet形状 - 球体,撕裂和镜头。还研究了在一些微量卷筒表面上形成次级分层结构的典型特征。由于进行了研究,通过使用扫描和透射电子显微镜检查,研究了微型电池对涂层的纳米结构变形的影响。已经提出了一个假设关于微滴形和二次结构的存在或不存在的关系和微滴尺寸和重量的关系,以及在从阴极移动到沉积表面的微滴水期间单元室中的条件。基于该研究的重点是微滴芯的形状和典型的典型特征,用于形成次要结构周围的二次结构,已经提出了假设,根据该假设,对于一些微型电流,它需要比以前假设的时间更多从阴极到沉积表面的运动。

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