Thin films electrodeposited from aqueous solutions containing W(VI) or Mo(VI) ions using rectangularpulse voltages with a 1 MHz frequency were investigated using scanning electron microscopy-energydispersive X-ray (SEM-EDX) spectroscopy and X-ray diffraction (XRD). SEM-EDX analysesconfirmed that the obtained thin films comprise W or Mo. The current efficiency increased with thecathode potential and tended to become constant, which is consistent with the phenomenological theoryof electrodeposition. The potential barrier of W6+ and Mo6+ was 6.5 V and the maximum currentefficiency (achieved by the W thin film) was 2.3 %. XRD analyses revealed that the W and Mo thinfilms have a body-centered cubic and amorphous structure, respectively.
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