In this study, we designed a p-channel 32 × 48 ion-sensitive field-effect transistor (ISFET) array sensorwith a modified membrane to detect chloride ion concentration. The proposed sensor includes threeparts, i.e., an ISFET array, readout interfacing circuits, and row/column selection circuits. Theunmodified ISFET array sensor was immersed in solutions with pH ranging from 2.88 to 10.40, and thesensing characteristics were evaluated. A high sensing average sensitivity(55.6 mV/pH) and linearity(0.945) were demonstrated. Then, a chloride ion-sensing membrane was dropped on the floating gate ofthe ISFET sensor. To evaluate the sensing characteristics of the chloride ion sensor, the sensor wasimmersed in different concentrations of NaCl solutions ranging from 10–5 M to 10–1 M. The averagesensitivity and linearity of the chloride ion sensor were 51.8 mV/pCl and 0.990, respectively..
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