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首页> 外文期刊>Karbala International Journal of Modern Science >Dynamic Analysis of Viscoelastic Circular Diaphragm of a MEMS Capacitive Pressure Sensor using Modified Differential Transformation Method
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Dynamic Analysis of Viscoelastic Circular Diaphragm of a MEMS Capacitive Pressure Sensor using Modified Differential Transformation Method

机译：MEMS电容式压力传感器粘弹性圆形隔膜的动态分析方法

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In this paper, a dynamic analysis of the viscoelastic circular diaphragm of a Micro-Electro-Mechanical System (MEMS) capacitive pressure sensor using the Modified Differential Transformation Method (MDTM) is presented. The MEMS technology has been increasingly used to fabricate sensors and actuators and the MEMS capacitive pressure sensor is emerging in many high-performance applications. The deflection of these sensors diaphragm (plate) depends largely on the material of the diaphragm. In this study, a circular diaphragm of viscoelastic material is modeled using the classical plate theory. The governing differential equation is solved using Modified Differential Transformation Method (MDTM) and the result is validated with Finite Difference Method (FDM). The result shows excellent agreement with the numerical method. The effects of amplitudes, frequency, viscoelastic parameter, and time of applied pressure on deflection of the viscoelastic circular diaphragm are investigated. It is established from the results that the deflection of the sensor increases with an increase in the amplitude, frequency and time of the applied pressure. In addition, an increase in the viscoelastic parameters resulted in an increase the deflection of the diaphragm which consequently increases the capacitance and sensitivity of the sensor. Hence, the viscoelastic circular diaphragm of the MEMS capacitive pressure sensor exhibits better sensitivity performance when compared with that of elastic material. Finally, the Modified Differential Transformation Method applied in obtaining the solution of the developed model is effective in predicting sensor characteristics. The study will enhance the design of MEMS capacitive pressure sensor with viscoelastic circular diaphragm.
机译：本文介绍了使用改进的差分变换方法（MDTM）的微电机械系统（MEMS）电容式压力传感器的粘弹性圆形隔膜的动态分析。 MEMS技术越来越多地用于制造传感器和致动器，并且MEMS电容压力传感器在许多高性能应用中出现。这些传感器膜片（板）的偏转主要取决于隔膜的材料。在该研究中，使用经典板理论建模粘弹性材料的圆形膜片。使用修改的差分变换方法（MDTM）来解决控制微分方程，并且通过有限差分法（FDM）验证结果。结果表现出与数值方法的良好协议。研究了幅度，频率，粘弹性参数和施加压力时间对粘弹性圆形隔膜的挠曲的影响。从施加压力的幅度，频率和时间的增加，传感器的偏转增加的结果是从结果的增加。另外，粘弹性参数的增加导致增加隔膜的偏转，从而增加了传感器的电容和灵敏度。因此，与弹性材料相比，MEMS电容式压力传感器的粘弹性圆形隔膜具有更好的敏感性。最后，在获得开发模型解决方案中的修改差分变换方法在预测传感器特性方面是有效的。该研究将提高MEMS电容压力传感器的设计，粘弹性圆形隔膜。

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