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首页> 外文期刊>Coatings >Indium Tin Oxide Thin Film Deposition by Magnetron Sputtering at Room Temperature for the Manufacturing of Efficient Transparent Heaters
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Indium Tin Oxide Thin Film Deposition by Magnetron Sputtering at Room Temperature for the Manufacturing of Efficient Transparent Heaters

机译：通过磁控溅射铟锡氧化物薄膜沉积在室温下进行高效透明加热器的制造

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摘要

Indium tin oxide (ITO) thin films are widely used as transparent electrodes in electronic devices. Many of those electronic devices are heat sensitive, thus their manufacturing process steps should not exceed 100 °C. Manufacturing competitive high-quality ITO films at low temperature at industrial scale is still a challenge. Magnetron sputtering technology is the most suitable technology fulfilling those requirements. However, ITO layer properties and the reproducibility of the process are extremely sensitive to process parameters. Here, morphological, structural, electrical, and optical characterization of the ITO layers deposited at low temperature has been successfully correlated to magnetron sputtering process parameters. It has been demonstrated that the oxygen flow controls and influences layer properties. For oxygen flow between 3–4 sccm, high quality crystalline layers were obtained with excellent optoelectronic properties (resistivity 80%). The optimized conditions were applied to successfully manufacture transparent ITO heaters on large area glass and polymeric components. When a low supply voltage (8 V) was applied to transparent heaters (THs), de-icing of the surface was produced in less than 2 min, showing uniform thermal distribution. In addition, both THs (glass and polycarbonate) showed a great stability when exposed to saline solution.
机译：氧化铟锡（ITO）薄膜广泛用作电子设备中的透明电极。其中许多电子设备是热敏的，因此它们的制造工艺步骤不应超过100°C。在工业规模的低温下制造竞争高质量ITO电影仍然是一项挑战。磁控溅射技术是最适合满足这些要求的技术。但是，ITO层属性和过程的再现性对过程参数非常敏感。这里，在低温下沉积的ITO层的形态学，结构，电和光学表征已经成功地与磁控溅射工艺参数相关。已经证明氧气流量控制和影响层性质。对于3-4 sccm之间的氧气流，获得高质量的晶体层，具有优异的光电性能（电阻率80％）。应用优化的条件以在大面积玻璃和聚合物组分上成功制造透明ITO加热器。当将低电源电压（8 V）施加到透明加热器（THS）时，在小于2分钟的情况下生产表面的去冰，显示出均匀的热分布。此外，在暴露于盐水溶液时，THS（玻璃和聚碳酸酯）显示出具有很大的稳定性。

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