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首页> 外文期刊>Coatings >Residual Stresses in Soft Magnetic FeTiB and FeZrN Films Obtained by Magnetron Deposition
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Residual Stresses in Soft Magnetic FeTiB and FeZrN Films Obtained by Magnetron Deposition

机译：软磁纤维和磁控沉积获得的软磁纤维和Fezrn薄膜的残余应力

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摘要

The coercive field of soft magnetic ferromagnets is a structure-sensitive property and, in particular, is substantially affected by residual stresses. In the present study, the phase and structural states and residual stresses of the FeTiB and FeZrN films of various compositions, which were prepared by magnetron deposition on glass substrates and subsequent 1-h annealing at temperatures of 200–600 °C, were investigated by X-ray diffraction. The formation of a nanocrystalline structure is observed. It comprises different phases having different lattice parameters and unit-cell volumes and is characterized by high level of microstrains of grains as well; the microstrains predetermine the formation of high compressive stresses in the deposited films. As the annealing temperature increases, the compressive stresses decrease, and, at certain temperatures, gradually the films transform into thermal tensile stresses, which are induced by the difference in the thermal expansion coefficients of the film and substrate. Thus, the heat treatment is the efficient way to improve the soft magnetic properties of the studied class of film materials produced by magnetron deposition.
机译：软磁铁磁体的矫顽电场是结构敏感性，特别是受残余应力的基本影响。在本研究中，通过磁控沉积在玻璃基板上并在200-600℃的温度下，通过磁控沉积制备的各种组合物的相位和结构状态和残余应力，并在200-600℃的温度下进行。 X射线衍射。观察到纳米晶体结构的形成。它包括具有不同晶格参数和单元电池体积的不同相位，其特征在于谷物的高水位;微威尔病预先确定沉积膜中的高压缩应力的形成。随着退火温度的增加，压缩应力降低，并且在某些温度下，薄膜逐渐变换成热拉应力，这通过薄膜和基板的热膨胀系数的差异诱导。因此，热处理是改善由磁控沉积产生的研究类薄膜材料的软磁特性的有效方法。

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