...
首页> 外文期刊>Coatings >Development of Indium Titanium Zinc Oxide Thin Films Used as Sensing Layer in Gas Sensor Applications
【24h】

Development of Indium Titanium Zinc Oxide Thin Films Used as Sensing Layer in Gas Sensor Applications

机译:用作气体传感器应用中的传感层的钛氧化锌薄膜的开发

获取原文
           

摘要

InTiZnO gas sensors with different oxygen ratios were fabricated by RF sputtering at room temperature. The sensing responses for five different gases, including ethanol, isopropanol (IPA), acetone (ACE), CO, and SO2, were reported. The InTiZnO gas sensor with the MSM (metal–semiconductor–metal) structure generated a higher sensing response when the O2/Ar ratio was increased to 10%. It also revealed high selectivity among these gases and good repeatability. Moreover, the UV light-activated InTiZnO gas sensors were also studied, which could reduce the operating temperature from 300 °C to 150 °C and did not seem to damage the sensing film, demonstrating long-term stability. The high response and selectivity revealed that InTiZnO thin films possess high potential to be applied in gas sensing technology.
机译:在室温下通过RF溅射制造具有不同氧比率的intizno气体传感器。 报道了五种不同气体,包括乙醇,异丙醇(IPA),丙酮(ACE),CO和SO2的传感反应。 当O2 / Ar比率增加到10%时,具有MSM(金属半导体 - 金属)结构的Intizno气体传感器产生更高的感测响应。 它还揭示了这些气体的高选择性和良好的重复性。 此外,还研究了UV光活化的Intizno气体传感器,可以将工作温度从300℃降低至150°C,并且似乎没有损坏传感薄膜,证明长期稳定性。 高响应和选择性显示,Intizno薄膜具有高电位才能应用于气体传感技术。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号