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Recent Progress in the Development of a-Se/CMOS Sensors for X-ray Detection

机译：用于X射线检测的A-SE / CMOS传感器开发的最新进展

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Amorphous selenium (a-Se) is a glass-former capable of deposition at high rates by thermal evaporation over a large area. It was chosen as a direct conversion material due to its appealing properties for imaging in both low and high X-ray energy ranges (30 keV and 30 keV, respectively). It has a bandgap of 2.2 eV and can achieve high photodetection efficiency at short wavelengths less than 400 nm which makes it appealing for indirect conversion detectors. The integration of a-Se with readout integrated circuits started with thin-film transistors for digital flat panel X-ray detectors. With increasing applications in life science, biomedical imaging, X-ray imaging, high energy physics, and industrial imaging that require high spatial resolution, the integration of a-Se and CMOS is one direct way to improve the high-contrast visualization and high-frequency response. Over the past decade, significant improvements in a-Se/CMOS technologies have been achieved with improvements to modulation transfer function and detective quantum efficiency. We summarize recent advances in integrating and photon-counting detectors based on a-Se coupled with CMOS readout and discuss some of the shortcomings in the detector structure, such as low charge conversion efficiency at low electric field and high dark current at high electric field. Different pixel architectures and their performance will be highlighted.
机译：无定形硒（A-SE）是一种能够在大面积上热蒸发以高速率沉积的玻璃以前。由于其在低X射线能量范围（分别为高X射线能量范围（分别为高X射线能量范围（分别为30kEV）的吸引性，因此选择作为直接转化材料。它具有2.2eV的带隙，并且可以在小于400nm的短波长的短波长的高度光电探效，这使得它可以吸引间接转换探测器。使用读出集成电路的A-SE的集成与数字平板X射线探测器的薄膜晶体管开始。随着生命科学的应用，生物医学成像，X射线成像，高能量物理和需要高空间分辨率的工业成像，A-SE和CMOS的集成是提高高对比度可视化和高的直接方法频率响应。在过去的十年中，通过改进调制转移功能和侦探量子效率，已经实现了A-SE / CMOS技术的显着改进。我们总结了基于A-SE的集成和光子计数探测器的近期进步，并讨论了检测器结构中的一些缺点，例如低电场下的低电荷转换效率和高电场的高暗电流。将突出显示不同的像素体系结构及其性能。

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